Auxetic Mold for Imprint Shape Correction
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Solution Overview
Problem
Conventional shape correction mechanisms for molds in imprint techniques, such as those disclosed in Japanese Patent Laid-Open No. 2008-504141, suffer from significant correction errors when deforming molds into shapes like trapezoids due to the effects of Poisson's ratio, particularly when using quartz materials with positive Poisson's ratio, leading to inaccuracies in pattern superposition.
Innovation Solution
The use of a mold with a negative effective Poisson's ratio, achieved through an auxetic structure or materials like cristobalite, allows for precise deformation into target shapes by applying compressive or tensile forces, reducing correction errors in patterns like trapezoidal components.
Engineering Contradictions & Design Principles
Engineering Contradiction Analysis
1Length of moving object
If a conventional shape correction mechanism applies compressive force to one base and tensile force to the other base of a quartz mold, then the length of the bases can be adjusted, but a large correction error occurs due to Poisson's ratio effects causing the bases to bend inward or outward
Solution Approach 1:
The invention changes the Poisson's ratio parameter of the mold material from positive (conventional quartz) to negative (auxetic material or structured mold). This parameter change fundamentally alters the deformation behavior under applied forces, eliminating the bending errors that occur with conventional materials while maintaining the ability to adjust base lengths for shape correction.
2Shape
If a mold with positive Poisson's ratio (quartz) is used for shape correction, then the mold can be deformed into trapezoidal shapes, but the corrected shape deviates from the target shape due to bending errors
Solution Approach 1:
The invention changes the Poisson's ratio parameter from positive to negative, which fundamentally alters the deformation characteristics. With negative Poisson's ratio, when compressive force is applied to one base, the base shortens without bending inward, and when tensile force is applied, the base extends without bending outward. This eliminates the shape deviation errors and achieves accurate trapezoidal pattern correction.
3Adaptability or versatility
If shape correction mechanisms are installed in plural locations on the outer circumference of a mold, then comprehensive shape correction can be performed, but the correction accuracy remains insufficient for sub-nanometer precision requirements
Solution Approach 1:
The invention changes the material parameter (Poisson's ratio) to negative, which enables the shape correction mechanisms to achieve sub-nanometer accuracy. The auxetic property ensures that forces applied at multiple locations produce predictable, non-bending deformations, allowing precise control of pattern shapes for advanced semiconductor fabrication.
Applied Scientific Principles
This section explains which scientific principles are used to turn an abstract innovation direction into a practical engineering solution.
Function Achieved in This Case
This approach significantly reduces correction errors in pattern shapes, enhancing the accuracy of pattern superposition and accommodating micronization trends in microfabrication by utilizing a mold with a negative effective Poisson's ratio, which can be either structurally or materially derived.
Implementation Method 1
the original has a negative effective Poisson's ratio
Implementation Method 2
achieved through an auxetic structure or materials like cristobalite
Data Source
AI summary
The original of the present invention has a pattern to be transferred. For example, the original of the present invention is a mold for use is an imprint apparatus or a mask for use in an exposure apparatus. The original has a negative effective Poisson's ratio. Alternatively, the original has an effective Poisson's ratio smaller than that of a quartz glass plate.