Auxiliary Transport Tool for Substrate Support Mounting
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Solution Overview
Problem
The existing methods for mounting and dismounting substrate supports in chambers often result in collisions with chamber walls, leading to metal dust generation and damage, particularly due to the heavy weight of substrate supports holding 300-mm or 450-mm wafers, which complicates secure fixation.
Innovation Solution
A method utilizing an auxiliary transport tool with expandable gas-charged portions to position and fix substrate supports without collision, involving an insertion step where the support's threaded portion is aligned above a chamber opening, and a shrinkage step where gas is discharged to move the support downward, preventing contact with the chamber wall during fixation.
Engineering Contradictions & Design Principles
Engineering Contradiction Analysis
1Ease of operation
If the substrate support is directly mounted or dismounted from the chamber, then the operation is simple and quick, but the substrate support collides against the chamber wall causing metal dust generation and damage
Solution Approach 1:
The patent introduces an auxiliary transport tool as an intermediary device between the substrate support and the chamber. This tool includes a first portion that contacts the substrate support and a second portion that enters the chamber through the opening. The auxiliary transport tool mediates the transfer of the substrate support into and out of the chamber, preventing direct collision with the chamber wall while maintaining operational simplicity.
Solution Approach 2:
The auxiliary transport tool is divided into two distinct portions: a first portion (with larger outside diameter) that remains outside the chamber and contacts the substrate support, and a second portion (with smaller outside diameter) that enters the chamber through the opening. This segmentation allows the tool to function effectively both inside and outside the chamber without requiring the entire tool to pass through the limited opening.
2Device complexity
If the substrate support is manually handled without assistance, then the equipment complexity is low, but the heavy weight (15-30 kg) causes collision and fixation damage
Solution Approach 1:
The auxiliary transport tool serves as a mechanical intermediary that bears the weight of the substrate support (15-30 kg) during transfer operations. By placing the first portion under the substrate support and using the second portion to guide it into the chamber, the tool distributes and manages the heavy load, preventing collision damage and ensuring reliable fixation without requiring complex heavy-lifting equipment.
3Ease of operation
If the chamber opening is made larger to facilitate substrate support insertion, then the insertion is easier, but the processing space is reduced and chamber structure is compromised
Solution Approach 1:
The auxiliary transport tool is segmented into two portions with different dimensions: the first portion has a larger outside diameter to contact and support the substrate support, while the second portion has a smaller outside diameter that fits through the existing chamber opening. This segmentation enables the tool to perform its function without requiring an enlarged chamber opening, thereby preserving the processing space volume.
Solution Approach 2:
The solution shifts the problem from a two-dimensional constraint (chamber opening size) to a three-dimensional solution by using an auxiliary tool with varying cross-sectional dimensions along its length. The first portion operates outside the chamber with larger dimensions, while the second portion transitions to smaller dimensions to pass through the opening, effectively utilizing the vertical dimension and tool geometry to resolve the space constraint.
Applied Scientific Principles
This section explains which scientific principles are used to turn an abstract innovation direction into a practical engineering solution.
Function Achieved in This Case
This method effectively prevents collisions and ensures secure fixation of substrate supports by using an auxiliary transport tool to manage the positioning and expansion of the substrate support's threaded portion, reducing the risk of damage and metal dust generation.
Implementation Method 1
a first portion capable of being expanded by being charged with a gas
Implementation Method 2
a shrinkage step of shrinking the first portion by discharging the gas from the first portion
Data Source
AI summary
A method of mounting a substrate support in a chamber includes placing an auxiliary transfer tool having a first portion and a second portion in a chamber which provides a processing space and an additional space, and which has an opening for communication between the additional space and the outside, the first portion in an expanded state being positioned in the processing space and the second portion being positioned in the additional space, inserting a substrate support having a contact portion for supporting the substrate, a rod portion, and a threaded portion connecting to the rod portion, the rod portion being slid on a side surface of the second portion, shrinking the first portion so that the rod portion is moved downward in the additional space and the threaded portion projects out of the chamber through the opening.