Avalanching Nanoparticles for Sub-100 Nm Infrared Lithography

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Solution Overview

Problem

Current 3D printing technologies face limitations in achieving high-resolution nanoscale manufacturing, particularly with two-photon polymerization (TPP) methods, which are expensive and labor-intensive, while alternative nanoscale techniques are even more costly and time-consuming, and there is a need for cost-effective solutions to meet the demand for smaller electronic devices.

Innovation Solution

Utilizing avalanching nanoparticles (ANPs) embedded in a polymerizable photoactivated material, activated by a continuous wave infrared laser, to achieve sub-100 nm resolution through multiphoton polymerization, reducing the need for high-power pulsed lasers and minimizing post-processing steps.

Engineering Contradictions & Design Principles

VSEngineering Contradiction Analysis

1Manufacturing precision

If two-photon polymerization (TPP) is used to achieve high-resolution 3D printing, then manufacturing precision is improved, but device complexity and cost increase due to requiring high-power femtosecond pulsed lasers

Engineering Contradiction:

Improveprinting resolutionVSAvoidlaser system complexity

Core Design Contradiction:

Manufacturing precisionVSDevice complexity

Solution Approach 1:

The patent introduces upconverting nanoparticles (UCNPs) as intermediary agents that absorb infrared laser light and convert it to higher energy photons through photon avalanche effect. These nanoparticles act as mediators between the infrared laser source and the photoresin, enabling two-photon polymerization to occur with a simpler, continuous-wave infrared laser instead of requiring complex femtosecond pulsed lasers.

Inventive Principle:

Principle #24Intermediary (Mediator)

Solution Approach 2:

The patent changes the operating parameters by using continuous-wave infrared laser (different wavelength and temporal characteristics) instead of femtosecond pulsed laser. The upconverting nanoparticles enable this parameter change by accumulating energy from the continuous-wave laser and releasing it as high-energy photons, thus achieving the same polymerization effect with different laser parameters.

Inventive Principle:

Principle #35Parameter changes

2Manufacturing precision

If traditional nanoscale manufacturing techniques are used, then manufacturing precision is improved, but productivity deteriorates due to being labor-intensive and time-consuming

Engineering Contradiction:

Improvenanoscale resolutionVSAvoidmanufacturing speed

Core Design Contradiction:

Manufacturing precisionVSProductivity

Solution Approach 1:

The patent replaces traditional mechanical nanoscale manufacturing techniques (such as electron beam lithography, focused ion beam, or manual nanopositioning) with an optical-based additive manufacturing system. The photon avalanche effect in UCNPs enables precise energy localization that achieves nanoscale resolution through optical fields rather than mechanical means, significantly improving manufacturing speed and automation capability.

Inventive Principle:

Principle #28Mechanics substitution (Replace mechanical system)

3Manufacturing precision

If high-power femtosecond pulsed lasers are used for TPP, then manufacturing precision is improved, but loss of energy increases due to high power requirements

Engineering Contradiction:

Improveprinting resolutionVSAvoidlaser power consumption

Core Design Contradiction:

Manufacturing precisionVSLoss of energy

Solution Approach 1:

The patent changes the laser operating parameters from high-power femtosecond pulsed regime to lower-power continuous-wave infrared regime. The upconverting nanoparticles efficiently convert the continuous-wave infrared energy into the required high-energy photons, reducing overall energy consumption while maintaining the precision needed for nanoscale printing.

Inventive Principle:

Principle #35Parameter changes

Solution Approach 2:

The upconverting nanoparticles serve as energy conversion intermediaries that efficiently transform the continuous-wave infrared laser energy into the high-energy photons required for polymerization. This intermediary mechanism reduces energy loss by avoiding the need for high-power pulsed laser operation and enabling more efficient energy transfer to the photoresin.

Inventive Principle:

Principle #24Intermediary (Mediator)

Applied Scientific Principles

This section explains which scientific principles are used to turn an abstract innovation direction into a practical engineering solution.

Function Achieved in This Case

The use of ANPs enables high-resolution 3D printing at a lower cost and with improved efficiency, allowing for portable and cost-effective nanoscale manufacturing with reduced post-processing requirements.

Implementation Method 1

activated by a continuous wave infrared laser, to achieve sub-100 nm resolution through multiphoton polymerization

Methodology Applied

Scientific EffectMultiphoton absorption: Absorption (EM radiation)

Implementation Method 2

polymerizable photoactivated material, activated by a continuous wave infrared laser, to achieve sub-100 nm resolution through multiphoton polymerization

Methodology Applied

Scientific EffectPhotopolymerization: Photopolymerisation

Data Source

PatentUS20250381730A1Lithography product and method facilitated by one or more avalanching nanoparticles

Publication Date: 2025.12.18 THE TRUSTEES OF COLUMBIA UNIV IN THE CITY OF NEW YORK

AI summary

According to exemplary embodiments of the present disclosure, products and methods can be provided for 3D printing on the nanoscale with avalanching nanoparticles. For example, polymerizable photoactivated material can be provided into which one or more avalanching nanoparticles can be embedded. With exemplary methods, it is possible to directs a radiation from a continuous wave infrared laser to impact and activate one or more ANPs embedded in the polymerizable photoactivated material.