Axially Offset Carrier Devices for Dual-Side Substrate Transport
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Solution Overview
Problem
Existing vacuum treatment systems face inefficiencies in substrate processing due to sequential handling and large volumes of process stations requiring vacuum conditions, leading to suboptimal use of treatment capacity and logistics.
Innovation Solution
A transport device with two rotatably mounted carrier devices, axially offset and synchronized for simultaneous substrate handling, allowing for increased throughput and symmetrical force distribution for improved sealing and processing efficiency.
Engineering Contradictions & Design Principles
Engineering Contradiction Analysis
1Productivity
If substrates are transported sequentially through individual process stations, then the system structure is simple, but the productivity is low and treatment capacity is underutilized
Solution Approach 1:
The transport device is segmented into multiple carrier devices (at least two) that are axially offset and can be independently operated. Each carrier device can hold and transport substrates separately, allowing parallel processing through the treatment unit. This segmentation enables simultaneous handling of multiple substrates without requiring a completely complex new system architecture.
Solution Approach 2:
The patent transitions from a single-plane sequential transport system to a multi-dimensional arrangement by positioning carrier devices at different axial locations. This spatial dimensionality change allows substrates to be introduced from opposite sides of the treatment unit simultaneously, effectively doubling the throughput without proportionally increasing system complexity.
2Productivity
If large volume process stations are used to accommodate substrates, then substrates can be properly treated, but the volume and space requirements increase
Solution Approach 1:
By introducing substrates from opposite axial sides of the treatment unit simultaneously, the effective processing capacity is doubled without increasing the volume of individual process stations. The treatment unit handles two substrates at once by utilizing the axial dimension for dual-side access.
Solution Approach 2:
The patent combines the functionality of multiple sequential treatment positions into a single treatment unit that can process multiple substrates simultaneously from opposite sides. This merging of treatment functions increases capacity utilization without requiring proportionally larger station volumes.
3Reliability
If valve plates are provided on opposite sides for sealing chambers, then vacuum sealing is achieved, but the outer housing must be sufficiently stable and torsion-resistant
Solution Approach 1:
The axially offset carrier devices are positioned and operated to create symmetrical force distribution on the outer housing. The forces exerted by valve plates and actuating mechanisms on opposite sides counterbalance each other, reducing torsional stress and improving housing stability while maintaining reliable vacuum sealing.
Solution Approach 2:
The patent uses symmetrical arrangement (a form of controlled asymmetry relative to traditional single-side operation) by positioning carrier devices and valve plates at opposite axial locations. This symmetrical configuration ensures balanced force distribution, reducing net torsional moments on the housing while maintaining sealing effectiveness.
4Productivity
If sequential substrate feeding is used, then the system is easy to operate, but the cycle time and processing efficiency are reduced
Solution Approach 1:
The transport device enables continuous useful action by simultaneously transporting and treating substrates on multiple carrier devices in parallel. While one substrate is being treated on one carrier, another substrate is being prepared or treated on a different carrier, eliminating idle time and reducing overall cycle time.
Solution Approach 2:
Multiple carrier devices can be prepared in advance with substrates loaded and positioned before entering the treatment unit. This preliminary preparation of multiple substrates simultaneously allows the system to maintain continuous operation without waiting for sequential processing to complete.
Data Source
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AI summary
The present invention relates to a transporting apparatus for simultaneously transporting at least two substrates (28) which are to be treated in a vacuum-treatment apparatus (11), having at least two carrier apparatuses (12, 14) which are mounted for rotation in relation to a common axis (1), are offset axially in relation to one another and on which is arranged at least in each case one retaining frame (20, 22, 24, 26) designed for accommodating at least one substrate (28), wherein the retaining frame (20, 22, 24, 26) can be shifted, by a rotary movement of the carrier apparatuses (12, 14) about the axis (1), into mutually opposite regions of action of a treatment unit (50), and wherein the carrier apparatuses (12, 14) are spaced apart axially from one another to such an extent that the treatment unit (50) can be arranged between them.