Alkali Metal Azide Spot Substrates for Uniform Miniature Gas Cells

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Solution Overview

Problem

Existing production methods for gas cells, such as those described in Non-Patent Documents 3 and 4, lack versatility in cell shape adjustment and are prone to non-uniformity and explosion risks, making them unsuitable for miniaturization and mass production.

Innovation Solution

A substrate with scattered alkali metal azide spots on a flat surface, allowing for flexible cell design and production through methods like mask application and ultraviolet vaporization, enabling precise control over cell shape and uniformity.

Engineering Contradictions & Design Principles

VSEngineering Contradiction Analysis

1Reliability

If glass fusion bonding or blowing is used to produce cell containers, then hermetic sealing is achieved, but the production process becomes complicated and miniaturization becomes difficult

Engineering Contradiction:
Improvehermetic sealingVSAvoidproduction process complexity
Core Design Contradiction:
ReliabilityVSDevice complexity

Solution Approach 1:

The invention divides the cell container into a substrate and a cover, with the substrate containing multiple recesses that form individual cell cavities. This segmentation allows parallel processing of multiple cells and simplifies the production process while maintaining hermetic sealing through wafer-level fabrication techniques.

Inventive Principle:
Principle #1Segmentation

Solution Approach 2:

The invention forms alkali metal azide spots in the recesses of the substrate before assembling the complete cell structure. This preliminary action enables precise control of alkali metal distribution and allows subsequent hermetic sealing to be performed uniformly across multiple cells simultaneously, facilitating miniaturization and mass production.

Inventive Principle:
Principle #10Preliminary action

2Quantity of substance

If partition walls are formed to separate multiple cells, then individual cell containment is achieved, but the cell shape cannot be changed after filling and versatility is reduced

Engineering Contradiction:
Improvecell separationVSAvoidcell shape flexibility
Core Design Contradiction:
Quantity of substanceVSAdaptability or versatility

Solution Approach 1:

The invention makes the cell configuration dynamic by forming alkali metal azide spots in recesses rather than using fixed partition walls. This allows the cell shape and size to be adjusted by modifying the recess patterns in the substrate, providing versatility for different atomic device applications while maintaining proper cell separation.

Inventive Principle:
Principle #15Dynamics

3Manufacturing precision

If vapor deposition is used to form CsN3 films, then film formation is achieved, but explosion and bumping occur during heating and film uniformity is poor

Engineering Contradiction:
Improvefilm formationVSAvoidheating stability
Core Design Contradiction:
Manufacturing precisionVSReliability

Solution Approach 1:

The invention changes the material parameter from CsN3 to alkali metal azide spots formed by a different method. The spots are formed by dispensing alkali metal azide solution followed by drying, avoiding the heating step that causes explosion and bumping in vapor deposition. This maintains film formation capability while improving heating stability and uniformity.

Inventive Principle:
Principle #35Parameter changes

4Quantity of substance

If RbN3 aqueous solution is pipetted into cavities followed by drying, then alkali metal source is deposited, but the process is complicated and not suitable for mass production

Engineering Contradiction:
Improvealkali metal depositionVSAvoidmass production capability
Core Design Contradiction:
Quantity of substanceVSProductivity

Solution Approach 1:

The invention merges the alkali metal deposition step with the substrate fabrication process. By forming alkali metal azide spots directly in the recesses of the substrate during wafer-level processing, the invention eliminates separate pipetting and drying steps for each cell, enabling mass production while maintaining precise alkali metal deposition.

Inventive Principle:
Principle #5Merging (Combining)

Applied Scientific Principles

This section explains which scientific principles are used to turn an abstract innovation direction into a practical engineering solution.

Function Achieved in This Case

The method allows for high-versatility production of uniform gas cells with controlled alkali metal content, suitable for miniaturized atomic devices, reducing production complexity and enhancing mass production capabilities.

Implementation Method 1

the cavities are then hermetically sealed by anodic bonding of glass to the openings

Methodology Applied
Scientific EffectVaporization: Evaporation

Implementation Method 2

vaporizing the alkali metal azide by irradiating the cell assembly with ultraviolet rays

Methodology Applied
Scientific EffectPhotodissociation: Photodissociation

Data Source

PatentUS12617713B2Substrate, method for producing substrate, and method for producing unit cell
Publication Date: 2026.05.05 NAT INST OF INFORMATION & COMM TECH
  • US12617713B2 patent drawing
  • US12617713B2 patent drawing

AI summary

The problem of the present invention is to provide a substrate with high versatility, a method for producing the substrate, and a method for producing a unit cell using the substrate. The problem is solved by providing a substrate comprising a plurality of alkali metal azide spots on a substantially flat surface.