Blanking Aperture Array Electrode Testing via Block Segmentation
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Solution Overview
Problem
The increasing number of electrodes in blanking aperture array (BAA) apparatuses for electron beam lithography systems leads to longer testing times and increased failure analysis complexity, with existing methods unable to efficiently detect and specify failures, particularly peeling-off issues due to thermal expansion differences, resulting in economic losses and reduced throughput.
Innovation Solution
A BAA apparatus with a plurality of apertures, each equipped with first and second electrodes, via plugs, drivers, and comparison circuitries, where the comparison circuitry compares driving signals with signals from via plugs to output comparison result signals, allowing for the detection of electrode failures without mounting the apparatus on a lithography system, and using compressors to reduce the number of external signals, enabling efficient testing and failure identification.
Engineering Contradictions & Design Principles
Engineering Contradiction Analysis
1Productivity
If the number of electrodes in the BAA apparatus is increased to handle higher integration semiconductor devices, then the lithography capability and throughput are improved, but the testing time and failure analysis complexity increase significantly
Solution Approach 1:
The patent divides the BAA apparatus into multiple blocks, each containing a subset of electrodes. Comparison circuitries are implemented at the block level to independently test electrodes within each block. This segmentation allows parallel testing of multiple blocks, reducing the overall testing time from sequential testing of all electrodes to concurrent testing of electrode subsets across different blocks.
Solution Approach 2:
The patent introduces a block-based hierarchical testing structure that adds a spatial dimension to the testing process. By organizing electrodes into blocks and implementing comparison circuitries at the block level, the system transforms the testing approach from a flat, sequential process to a multi-level hierarchical process, enabling parallel testing and reducing testing time complexity.
2Manufacturing precision
If more electrodes are added to the BAA apparatus, then the lithography precision and pattern formation capability are improved, but the device complexity and failure analysis difficulty increase
Solution Approach 1:
The patent segments the large electrode array into smaller blocks, each with its own comparison circuitry. This segmentation simplifies the overall system by breaking down the complex electrode array into manageable units, making failure analysis more tractable by localizing potential issues to specific blocks rather than searching through the entire electrode array.
Solution Approach 2:
The comparison circuitries provide immediate feedback by comparing driving signals with actual electrode signals and outputting comparison results that indicate electrode status. This feedback mechanism enables real-time monitoring of electrode functionality, simplifying failure analysis by directly identifying non-functional electrodes through the comparison results rather than requiring complex diagnostic procedures.
3Reliability
If traditional testing methods are used for BAA apparatus with many electrodes, then comprehensive testing can be performed, but the testing efficiency decreases and economic losses increase
Solution Approach 1:
The patent implements block-based segmentation that enables parallel testing of multiple electrode subsets simultaneously. This maintains testing completeness by ensuring all electrodes are tested while dramatically improving efficiency through parallel processing, where multiple blocks can be tested at the same time rather than sequentially, reducing overall testing time and increasing productivity.
Solution Approach 2:
The comparison circuitries are pre-configured within each block to perform automatic signal comparison and failure detection. This preliminary action is built into the device structure, allowing testing to proceed efficiently without requiring external testing equipment or complex external test setups, thereby maintaining comprehensive testing while improving efficiency through integrated automated comparison.
Applied Scientific Principles
This section explains which scientific principles are used to turn an abstract innovation direction into a practical engineering solution.
Function Achieved in This Case
This solution enables rapid and complete testing of electrodes, reduces testing time, and accurately identifies failure locations, preventing pattern errors and improving throughput by detecting peeling-off issues before they cause operational disruptions.
Implementation Method 1
the electron beam is deflected with an electric field generated in this way
Implementation Method 2
a first via plug is electrically connected to the first electrode, a second via plug is electrically connected to the first electrode
Data Source
AI summary
In one embodiment, a BAA apparatus 204 includes apertures 3, each of which being provided to blank charged particle beams 20. The apparatus 204 further includes first electrodes 6a, second electrodes 6b, first via plugs 5a, second via plugs 5c, drivers 2 and comparison circuitries 7 that are provided for each aperture 3, wherein a first electrode 6a and a second electrode 6b are opposite to each other, first and second via plug 5a and 5c are electrically connected to the first electrode 6a, a driver 2 supplies a driving signal to the first electrode 6a via the first via plug 5a, and a comparison circuitry 7 is provided to correspond to the first electrode 6a and compares the driving signal and a signal obtained from the second via 5c plug to output a comparison result signal indicating a result of the comparison.