Back-Grinding Wheel Groove Structure for Controlled Particle Detachment
Find Innovative SolutionsGenerate Solutions
Solution Overview
Problem
Existing grinding wheels used in back-grinding processes for semiconductor substrates face challenges in efficiently detaching grinding particles, which affects the degree of grinding and the longevity of the abrasive article.
Innovation Solution
A grinding wheel with a wheel body and an abrasive article featuring groove holes recessed on its lateral surface, allowing for easy detachment of grinding particles and adjustable density and shape of groove holes to control the grinding process.
Engineering Contradictions & Design Principles
Engineering Contradiction Analysis
1Productivity
If groove holes are added to the abrasive article to facilitate detachment of grinding particles, then the degree of grinding and particle detachment improve, but the structural complexity of the abrasive article increases
Solution Approach 1:
The abrasive article incorporates groove holes (first groove hole and second groove hole) extending through the abrasive body, creating a porous-like structure that facilitates particle detachment. These groove holes allow grinding particles to be easily removed from the abrasive article surface, thereby improving the degree of grinding and maintaining high productivity throughout the abrasive article's service life.
Solution Approach 2:
The abrasive article is segmented into distinct regions with groove holes creating separated pathways for particle detachment. The first groove hole extends from the first surface and the second groove hole extends from the second surface, dividing the abrasive body into multiple sections that facilitate controlled particle release and improve overall grinding performance.
2Productivity
If the number and density of groove holes are increased to improve particle detachment, then grinding performance improves, but the manufacturing complexity and cost increase
Solution Approach 1:
The invention optimizes the parameters of the groove holes including their number, density, depth, and positioning to achieve effective particle detachment. By carefully controlling these parameters (e.g., specific density distribution, depth relative to abrasive body thickness), the design achieves high grinding performance while maintaining manufacturability through standardized production processes.
3Productivity
If groove holes are formed deeper in the abrasive body to enhance particle detachment, then grinding efficiency improves, but the durability and structural integrity of the abrasive article deteriorate
Solution Approach 1:
The depth of the groove holes is carefully controlled as a critical parameter to balance particle detachment efficiency with structural integrity. The groove holes are designed to extend sufficiently deep to facilitate particle release but not so deep as to compromise the overall strength and durability of the abrasive article, achieving an optimal parameter range for both grinding efficiency and reliability.
Solution Approach 2:
The groove holes are strategically positioned and dimensioned to create local detachment zones without compromising the overall structural quality of the abrasive article. The local modification through groove holes provides enhanced particle detachment in specific regions while maintaining the global structural integrity and durability of the entire abrasive body.
Applied Scientific Principles
This section explains which scientific principles are used to turn an abstract innovation direction into a practical engineering solution.
Function Achieved in This Case
The grinding wheel effectively increases the degree of grinding by easily detaching grinding particles and allows for adjustments in groove hole density and shape to improve the durability and performance of the abrasive article.
Implementation Method 1
the punching machine includes one of a water jet nozzle and a laser generator
Implementation Method 2
the punching machine includes one of a water jet nozzle and a laser generator
Data Source
AI summary
Disclosed are grinding wheels, back-grinding apparatuses, and abrasive article manufacturing methods. The grinding wheel comprises a wheel body having a disk shape and an abrasive article combined with one surface of the wheel body. The abrasive article includes an abrasive body and a plurality of grinding particles in the abrasive body. The abrasive body provides a groove hole that is recessed in a first direction as a horizontal direction on a lateral surface of the abrasive body. A length in the first direction of the groove hole is less than a width in the first direction of the abrasive body.