Back-Illuminated InGaAs Detector Stack for Wideband SWIR Sensing

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Solution Overview

Problem

Existing electromagnetic radiation detectors struggle to effectively detect a wide band of electromagnetic radiation wavelengths, particularly in the short-wave infrared (SWIR) range, with high signal-to-noise ratio (SNR) and extended absorption range.

Innovation Solution

The development of wideband back-illuminated electromagnetic radiation detectors using an indium phosphide (InP) substrate with stacked indium gallium arsenide (InGaAs) absorbers and buffer layers, allowing for the absorption of a wide range of electromagnetic radiation wavelengths, including SWIR wavelengths.

Engineering Contradictions & Design Principles

VSEngineering Contradiction Analysis

1Adaptability or versatility

If a single absorber material is used in electromagnetic radiation detectors, then the detector structure remains simple, but the absorption range and signal-to-noise ratio are limited

Engineering Contradiction:
Improveabsorption rangeVSAvoiddetector structure
Core Design Contradiction:
Adaptability or versatilityVSDevice complexity

Solution Approach 1:

The detector is divided into multiple absorber layers (first InGaAs absorber and second InGaAs absorber) with different bandgaps, where each layer absorbs specific wavelength ranges. This segmentation allows the detector to cover a broader spectral range while maintaining manageable structural complexity through systematic layering.

Inventive Principle:
Principle #1Segmentation

Solution Approach 2:

The detector employs composite material structure combining InP substrate with multiple InGaAs absorber layers having different compositions (different indium and gallium ratios). This composite approach enables tailored absorption characteristics for different SWIR wavelength bands, extending the overall absorption range while maintaining structural integrity.

Inventive Principle:
Principle #40Composite materials

2Reliability

If existing detector configurations are used, then manufacturing processes remain straightforward, but the signal-to-noise ratio and detection effectiveness in SWIR range are insufficient

Engineering Contradiction:
Improvesignal-to-noise ratioVSAvoiddetector configuration
Core Design Contradiction:
ReliabilityVSDevice complexity

Solution Approach 1:

Different regions of the detector are designed with locally optimized properties: the first InGaAs absorber layer has specific composition for absorbing shorter SWIR wavelengths, while the second InGaAs absorber layer has different composition for longer SWIR wavelengths. This local quality optimization ensures high signal-to-noise ratio across the entire SWIR spectrum by matching material properties to specific detection requirements.

Inventive Principle:
Principle #3Local quality

Solution Approach 2:

The detector utilizes parameter changes in the InGaAs material composition (varying indium and gallium ratios) to tune the bandgap and absorption characteristics of each layer. By changing these material parameters, the detector achieves optimized signal-to-noise ratio for different wavelength ranges while maintaining a relatively systematic device configuration.

Inventive Principle:
Principle #35Parameter changes

Applied Scientific Principles

This section explains which scientific principles are used to turn an abstract innovation direction into a practical engineering solution.

Function Achieved in This Case

This configuration enhances the detectors' ability to detect electromagnetic radiation across a broad spectral range with improved SNR and extended absorption range, effectively addressing the limitations of existing detectors.

Implementation Method 1

a first indium gallium arsenide (InGaAs) electromagnetic radiation absorber stacked on the first surface and configured to absorb a first set of electromagnetic radiation wavelengths

Methodology Applied
Scientific EffectElectromagnetic radiation absorption: Absorption (EM radiation)

Implementation Method 2

a set of one or more buffer layers stacked on the first InGaAs electromagnetic radiation absorber and configured to absorb at least some of the first set of electromagnetic radiation wavelengths

Methodology Applied
Scientific EffectElectromagnetic radiation absorption: Absorption (EM radiation)

Implementation Method 3

a second InGaAs electromagnetic radiation absorber stacked on the set of one or more buffer layers and configured to absorb a second set of electromagnetic radiation wavelengths

Methodology Applied
Scientific EffectElectromagnetic radiation absorption: Absorption (EM radiation)

Implementation Method 4

an immersion condenser lens formed on the second surface and configured to direct electromagnetic radiation through the InP substrate

Methodology Applied
Scientific EffectRefraction: Refraction

Implementation Method 5

an immersion condenser lens formed on the second surface and configured to direct electromagnetic radiation through the InP substrate

Methodology Applied
Scientific EffectTotal internal reflection: Total Internal Reflection

Data Source

PatentUS12206032B2Wideband back-illuminated electromagnetic radiation detectors
Publication Date: 2025.01.21 APPLE INC
  • US12206032B2 patent drawing
  • US12206032B2 patent drawing
  • US12206032B2 patent drawing

AI summary

An electromagnetic radiation detector includes an InP substrate having a first surface opposite a second surface; a first InGaAs electromagnetic radiation absorber stacked on the first surface and configured to absorb a first set of electromagnetic radiation wavelengths; a set of one or more buffer layers stacked on the first InGaAs electromagnetic radiation absorber and configured to absorb at least some of the first set of electromagnetic radiation wavelengths; a second InGaAs electromagnetic radiation absorber stacked on the set of one or more buffer layers and configured to absorb a second set of electromagnetic radiation wavelengths; and an immersion condenser lens formed on the second surface and configured to direct electromagnetic radiation through the InP substrate and toward the first InGaAs electromagnetic radiation absorber and the second InGaAs electromagnetic radiation absorber.