Back Plate Protrusion Layout for OLED Mask Attachment Accuracy
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Solution Overview
Problem
The attachment accuracy between a glass substrate and a mask during the deposition process in OLED manufacturing is compromised due to deformation of the glass substrate caused by proximity of mask protrusions to its edge, leading to poor product yield and typesetting rate.
Innovation Solution
A back plate with protrusions arranged in an array is used to press the glass substrate against the mask, ensuring a minimum vertical distance between adjacent protrusions and the mask edge, reducing substrate deformation and improving attachment accuracy.
Engineering Contradictions & Design Principles
Engineering Contradiction Analysis
1Area of stationary object
If protrusions are placed close to the edge of the mask to maximize pressing coverage, then the attachment area is improved, but the glass substrate deformation increases
Solution Approach 1:
The patent applies different spatial relationships to different regions of the mask. Protrusions in the central region are positioned to maximize attachment area, while protrusions near the edge maintain a preset distance from the mask edge. This local differentiation allows the system to achieve both large attachment area and reduced substrate deformation by adapting the protrusion positioning strategy to the specific requirements of different spatial zones.
2Manufacturing precision
If protrusions are positioned far from the mask edge to reduce substrate deformation, then the attachment precision is improved, but the attachment area decreases
Solution Approach 1:
The patent segments the mask area into different zones based on distance from the edge. The first preset area (central region) allows protrusions to be positioned for maximum attachment coverage, while the second preset area (edge region) maintains protrusions at a preset distance from the mask edge. This segmentation enables the system to optimize for attachment area in the center while protecting the edge regions from deformation.
3Stability of the object's composition
If multiple protrusions are arranged densely to improve pressing uniformity, then the pressure distribution is improved, but the risk of substrate deformation near edges increases
Solution Approach 1:
The patent implements different spatial arrangements of protrusions in different regions. In the central first preset area, protrusions can be densely arranged to achieve uniform pressure distribution. In the edge second preset area, protrusions are positioned at a preset distance from the mask edge, reducing their density but preventing substrate deformation. This local quality differentiation allows the system to maintain pressure uniformity where needed while avoiding deformation risks at the edges.
Data Source
AI summary
A back plate configured to press a mask assembly. The mask assembly includes a glass substrate and a mask that are stacked on the glass substrate. The back plate covers a surface of the glass substrate to press the glass substrate, thereby attaching the glass substrate to the mask. The back plate includes a bottom plate and multiple protrusions, the multiple protrusions include multiple bottom plate protrusions disposed on a side of the bottom plate facing the glass substrate. The multiple bottom plate protrusions are arranged in an array. Orthographic projections of the bottom plate protrusions on a plane of the mask fall within the mask. A distance between the projections of the bottom plate protrusions disposed adjacent to an edge of the mask and the edge of the mask is greater than or equal to a preset distance.