Backfunctionalized Imidazolinium Salts for Conformal Metal Deposition
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Solution Overview
Problem
Current methods for synthesizing backfluorinated N-heterocyclic carbene complexes are inefficient for industrial use and lack mechanisms for additional functionalization, particularly in coating complex surfaces during metal deposition processes.
Innovation Solution
A method involving the cyclization of halogenated acrylates or allyl ethers with Hünig's base in polar aprotic solvents to produce backfunctionalized imidazolinium salts, which can be used to synthesize backfluorinated NHC carbene complexes and Grubbs-Hoveyda catalysts, enabling efficient metal deposition with reduced waste and improved solubility in supercritical fluids.
Engineering Contradictions & Design Principles
Engineering Contradiction Analysis
1Manufacturing precision
If conventional CVD processes are used for metal deposition, then metal coating can be deposited on substrates, but internal structures with tortuous features are not effectively coated
Solution Approach 1:
The patent changes the physical state parameters of the working fluid by using supercritical conditions (temperature and pressure above critical point) to achieve both liquid-like solubility and gas-like penetration, enabling effective coating of tortuous surfaces while maintaining coating uniformity
2Manufacturing precision
If hot-wall processing system is used for SFD, then substrate can be coated effectively, but metal is deposited on all interior surfaces of the processing chamber causing waste
Solution Approach 1:
The patent applies local quality by heating only the substrate holder and substrate area rather than the entire processing chamber, creating a localized thermal zone that directs deposition only where needed (on the substrate) while leaving other chamber surfaces cool and non-reactive
Solution Approach 2:
The patent segments the heating function by separating the substrate holder heating from the chamber wall heating, using independent heating zones to control where deposition occurs, thereby preventing waste on chamber surfaces
3Loss of substance
If cold-wall processing system is used for SFD, then metal deposition waste is reduced, but the organometallic precursor must be thermally stable and yet reducible at elevated temperatures
Solution Approach 1:
The patent modifies the precursor molecular structure by incorporating fluorinated alkyl groups and heterocyclic ligands, which fundamentally changes the thermal and chemical stability parameters of the compound, enabling it to meet the cold-wall process requirements of high thermal stability and controlled reducibility
4Reliability
If conventional synthesis methods are used for backfluorinated NHC carbene complexes, then complexes can be synthesized, but the methods are inefficient for industrial use and lack additional functionalization mechanisms
Solution Approach 1:
The patent achieves multi-functionality by incorporating backfunctionalized groups (ester, amide, aromatic) into the NHC carbene structure, allowing the complex to simultaneously serve as a stable precursor, a soluble compound in supercritical fluids, and a potentially catalytically active species with additional functional groups for further modification
Applied Scientific Principles
This section explains which scientific principles are used to turn an abstract innovation direction into a practical engineering solution.
Function Achieved in This Case
This approach allows for the efficient synthesis of backfluorinated NHC carbene complexes, enabling conformal metal deposition on complex surfaces with reduced waste and improved thermal stability, enhancing the efficiency of supercritical chemical fluid deposition processes.
Implementation Method 1
The liquid-like state of the supercritical fluid enables increased solubility of the organometallic precursor
Implementation Method 2
the gas-like state of the supercritical fluid enables a deep, conformal penetration of the features of the substrate
Implementation Method 3
A reducing agent, usually hydrogen, is then introduced to cause the metal portion of the organometallic precursor 18 to deposit onto the substrate 16
Data Source
AI summary
Backfunctionalized imidazolinium salts and methods of synthesizing the same and NHC carbene-metal complexes therefrom. For backfunctionalized imidazolinium salts of the formula:Wherein R1 is selected from the group consisting of an ester group, an amide group, and an aromatic group; R2 is selected from the group consisting of hydrogen, an ester group, an amide group, and an aromatic group; R3 and R4 are each an aliphatic group; and X is an anion; the method comprises cyclization of a halogenated acrylate with Hünig's base in a solvent.