Driving Backplane Correction Structure for Micro-LED Transfer Alignment
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Solution Overview
Problem
The process of transferring close micro-LEDs from a growth substrate or carrier substrate to a driving backplane is hindered by position offset and relative displacement issues, affecting the overall transferring yield.
Innovation Solution
A driving backplane is designed with a base substrate, connection electrode groups, and correction structures. The correction structures, with acute slope angles, are positioned to guide and align the micro-LED electrodes with the connection electrodes, ensuring accurate positioning and contact.
Engineering Contradictions & Design Principles
Engineering Contradiction Analysis
1Manufacturing precision
If micro-LEDs are transferred from growth substrate to driving backplane, then high resolution and fast response time are achieved, but position offset and alignment inaccuracies occur
Solution Approach 1:
The correction structures are pre-formed on the driving backplane before micro-LED transfer. These structures proactively compensate for expected alignment deviations by creating guide slopes that redirect misplaced micro-LED electrodes to correct contact points, thus preliminarily correcting positioning errors before the transfer process completes
Solution Approach 2:
The correction structures act as intermediary elements between the micro-LED electrodes and the connection electrodes. When alignment deviations occur, these intermediate structures provide a corrective interface that guides the electrodes to proper contact, mediating the transfer process and improving both positioning accuracy and transferring yield
2Manufacturing precision
If photolithography alignment is used for electrode positioning, then manufacturing process is simplified, but alignment accuracy is limited by device precision
Solution Approach 1:
The correction structures enable self-correction of alignment errors. Instead of relying solely on high-precision photolithography equipment, the structure itself provides the correction mechanism through its geometric design, allowing the system to self-compensate for alignment inaccuracies without adding complex external alignment systems
3Productivity
If micro-LED electrodes are allowed to fall freely onto connection electrodes, then transfer speed is increased, but relative displacement and positioning error increase
Solution Approach 1:
The invention converts the harmful effect of free-fall displacement into a beneficial alignment mechanism. The correction structures are designed with slopes that intentionally utilize the falling motion of micro-LED electrodes to guide them along the slope to the correct contact point, transforming positioning errors into accurate alignment
Data Source
AI summary
A driving backplane, a display panel and a display apparatus are provided. The driving backplane includes: a base substrate, and a plurality of connection electrode groups and a plurality of correction structures disposed on the base substrate, each of the connection electrode groups includes: a first connection electrode and a second connection electrode the first connection electrode and the second connection electrode are arranged on a same layer; a first gap is formed between the first connection electrode and the second connection electrode, and a first group of opposite edges includes: an edge, close to the first gap, of the first connection electrode; and an edge, close to the first gap, of the second connection electrode; a second group of opposite edges includes: an edge, far away from the first gap, of the first connection electrode; and an edge, far away from the first gap, of the second connection electrode.