Backscattered Electron Spectrum Analysis for Sample Density Evaluation
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Solution Overview
Problem
Existing backscattered electron imaging techniques can evaluate sample compositions but not densities.
Innovation Solution
A method and apparatus that acquire a backscattered electron spectrum, separate the elastically scattered peak into minor peaks by waveform separation, and identify chemical elements and densities from the positions and widths of these peaks.
Engineering Contradictions & Design Principles
Engineering Contradiction Analysis
1Measurement precision
If backscattered electron imaging is used to evaluate sample compositions, then composition evaluation is easy and effective, but density evaluation becomes impossible
Solution Approach 1:
The patent segments the elastically scattered peak into multiple minor peaks through waveform separation. This segmentation allows the system to extract multiple independent parameters (positions and widths of individual peaks) from a single spectral feature, enabling both composition identification and density evaluation simultaneously.
Solution Approach 2:
The patent transitions from using only peak intensity (one dimension) to utilizing both peak position and width (adding spatial and dimensional parameters). This dimensional expansion of the spectral analysis enables the system to derive additional information about sample density beyond what composition alone can provide.
2Device complexity
If the elastically scattered peak is treated as a single peak, then the analysis is simple, but both composition and density information cannot be extracted
Solution Approach 1:
The patent applies waveform separation to divide the elastically scattered peak into multiple minor peaks. This segmentation extracts additional information (positions and widths of individual peaks) that would otherwise be lost in a single peak treatment, enabling density evaluation while maintaining analytical simplicity.
Solution Approach 2:
The patent introduces waveform separation as an intermediary processing step between peak detection and information extraction. This intermediary technique facilitates the extraction of multiple parameters (position, width, intensity) from the spectral data, serving as a bridge that enables both composition and density evaluation without significantly increasing overall system complexity.
Applied Scientific Principles
This section explains which scientific principles are used to turn an abstract innovation direction into a practical engineering solution.
Function Achieved in This Case
Precisely identifies chemical elements and evaluates sample densities using backscattered electron spectra.
Implementation Method 1
separating an elastically scattered peak of the backscattered electron spectrum
Implementation Method 2
an electron energy analyzer for spectrally dispersing and detecting backscattered electrons emitted from the sample
Data Source
AI summary
There is provided an evaluation method of evaluating the density of a sample. The evaluation method starts with acquiring a backscattered electron spectrum from the sample. Then, an elastically scattered peak of the spectrum is separated into a plurality of minor peaks by waveform separation. Information about the positions and widths of the minor peaks is derived. The chemical elements making up the sample are identified from the positions and widths of the minor peaks.