Backscattered Electron Analysis for Quantifying Low-Z Elements
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Solution Overview
Problem
Existing methods struggle to quantitatively determine elements with low atomic numbers, such as lithium or beryllium, due to low-energy characteristic X-ray radiation absorption and limited detection sensitivity, especially in X-ray spectroscopy detectors.
Innovation Solution
Combining backscattered electron signals with X-ray spectroscopy results using backscatter coefficients to compensate for detection limitations, allowing for a quantitative determination of elements with low atomic numbers by correlating gray values with element fractions.
Engineering Contradictions & Design Principles
Engineering Contradiction Analysis
1Measurement precision
If X-ray spectroscopy is used to determine element composition, then quantitative analysis is feasible for higher atomic numbers, but elements with low atomic numbers (less than 5) cannot be detected
Solution Approach 1:
The patent combines backscattered electron detection with X-ray spectroscopy detection to create a hybrid analysis system. The backscattered electron signal provides sensitivity for low atomic number elements (Z<5) that X-ray spectroscopy cannot detect, while X-ray spectroscopy provides quantitative composition data for higher Z elements. By merging these two detection methods and their respective data sets, the system achieves both extended detection range and maintained measurement precision across the full element spectrum.
Solution Approach 2:
The patent uses backscattered electron detection as an intermediary method to detect low atomic number elements that X-ray spectroscopy cannot directly detect. The backscattered electron signal serves as a mediator that translates the presence of low-Z elements into measurable signals, which are then integrated with X-ray spectroscopy data to provide complete elemental analysis including elements with Z<5.
2Adaptability or versatility
If windowless X-ray radiation detectors are used to extend detection limit to lower atomic numbers, then detection limit is extended, but achievable detection limits are normally higher than 20 wt % to 30 wt %
Solution Approach 1:
The patent merges backscattered electron detection with windowless X-ray spectroscopy detection to overcome the high detection limit (20-30 wt%) of windowless detectors. The backscattered electron signal provides enhanced sensitivity for low-Z elements, allowing detection at much lower concentrations than windowless X-ray spectroscopy alone can achieve, while the combined system maintains the extended detection range to Z<5.
3Measurement precision
If characteristic X-ray radiation of elements with small atomic number is detected, then element composition can be determined, but the low-energy radiation is absorbed both in the sample itself and in windows of X-ray radiation detectors
Solution Approach 1:
The patent uses backscattered electron detection as an intermediary method to bypass the absorption problem affecting low-energy X-ray radiation. Since backscattered electrons are charged particles that interact differently with matter compared to X-rays, they can detect low-Z elements without suffering from the same absorption losses, providing a complementary detection pathway that overcomes the radiation absorption barrier.
Solution Approach 2:
The patent substitutes the X-ray detection mechanism with electron detection for low-Z element analysis. By replacing the electromagnetic radiation-based X-ray spectroscopy with particle-based backscattered electron detection for detecting elements with Z<5, the system avoids the absorption issues inherent to low-energy X-ray radiation while maintaining quantitative analysis capability.
Applied Scientific Principles
This section explains which scientific principles are used to turn an abstract innovation direction into a practical engineering solution.
Function Achieved in This Case
Enables accurate and cost-effective quantification of elements like lithium and beryllium by synergistically integrating backscattered electron images with X-ray spectroscopy data, overcoming detection limitations and improving precision.
Implementation Method 1
elastically scattered electrons are detected using a BSE detector (backscattered electron detector)
Implementation Method 2
emitted X-ray radiation is detected using an X-ray spectroscopy detector, typically an EDX detector
Implementation Method 3
inelastically scattered electrons are detected using a secondary electron detector
Data Source
AI summary
A computer-assisted method for determining an element fraction of a determination element, in particular with a small atomic number, especially lithium, of an examination region of a sample bombarded with primary electrons, wherein a backscattered electron signal, preferably a backscattered electron image, captured using a backscattered electron detector and a spectroscopy element composition of the examination region determined using an X-ray spectroscopy detector, such as an EDX detector, are obtained. A practicable quantitative determination can be achieved if a measured gray value SM determined from the backscattered electron signal is combined with element fractions of the spectroscopy element composition in order to determine a fraction of the determination element. A device for processing data and to a computer product for carrying out the method is also disclosed.