Backside Mounted Electrode Carrier for Plasma Processing
Find Innovative SolutionsGenerate Solutions
Solution Overview
Problem
Existing electrode carriers for multi-component electrodes in plasma processing systems fail to effectively limit movement and secure electrodes during handling and processing, leading to potential contamination and inefficiencies in operations.
Innovation Solution
A backside mounted electrode carrier with an accommodating aperture and sidewall projections to limit lateral movement, combined with electrode mounting hardware that engages the electrode from the backside to prevent axial movement, and twist-lock pathways for secure bracing, along with a purge plate system for gas handling.
Engineering Contradictions & Design Principles
Engineering Contradiction Analysis
1Reliability
If existing electrode carriers are used, then electrode handling is simple, but electrode movement is not effectively limited leading to contamination risks
Solution Approach 1:
The carrier is divided into distinct functional components: an electrode accommodating aperture for positioning, sidewall projections for lateral support, and backside mounting hardware for axial securing. This segmentation allows each component to address specific movement control needs, effectively limiting both lateral and axial electrode movement to prevent contamination.
2Adaptability or versatility
If multi-component electrodes are used, then plasma processing capability is improved, but handling and securing complexity increases
Solution Approach 1:
The carrier design provides universal support for multi-component electrodes through a standardized accommodating aperture and mounting interface. The sidewall projections and backside hardware work together as an integrated system that handles the complexity of multi-component electrodes while presenting a simple, unified interface for electrode securing, thus managing handling complexity despite enhanced processing capability.
3Reliability
If electrode mounting hardware is added to limit axial movement, then electrode security is improved, but device complexity increases
Solution Approach 1:
The mounting hardware is merged with the carrier structure itself, forming an integrated backside mounting system. The hardware engages with the electrode through the existing accommodating aperture and works in conjunction with the sidewall projections, combining multiple securing functions into a unified structure that limits both lateral and axial movement without requiring separate independent components.
Data Source
AI summary
A carrier assembly is provided comprising a backside mounted electrode carrier and electrode mounting hardware. The backside mounted electrode carrier comprises an electrode accommodating aperture, which in turn comprises a sidewall structure that is configured to limit lateral movement of an electrode positioned in the aperture. The electrode accommodating aperture further comprises one or more sidewall projections that support the weight of an electrode positioned in the aperture. The electrode mounting hardware is configured to engage an electrode positioned in the electrode accommodating aperture from the backside of the carrier and urge the electrode against the sidewall projections so as to limit axial movement of the electrode in the electrode accommodating aperture. Additional embodiments of broader and narrower scope are contemplated.