Backside Patterned Metal Layer for X-ray Attack Prevention

Resolve Bottlenecks,
Find Innovative Solutions
Generate Solutions

Solution Overview

Problem

Existing methods for securing integrated circuits against active x-ray attacks, such as package shielding, are prone to tampering and unable to prevent the determination of functional states and theft of key technology and intellectual property.

Innovation Solution

A buried patterned metal layer is implemented between a semiconductor material and an insulator layer, with electrical connections and logic circuits to detect resistance changes, generating a tamper signal and altering circuit operation when a backside attack occurs, thereby preventing x-ray penetration and tampering.

Engineering Contradictions & Design Principles

VSEngineering Contradiction Analysis

1Object-affected harmful factors

If package shielding is used to prevent x-ray attacks, then security against x-ray penetration is improved, but the device becomes prone to tampering and cannot prevent determination of functional states

Engineering Contradiction:
Improvex-ray penetration preventionVSAvoidtamper resistance
Core Design Contradiction:
Object-affected harmful factorsVSReliability

Solution Approach 1:

A backside patterned metal layer is introduced as an intermediary component between the semiconductor devices and the external environment. This metal layer serves dual purposes: it blocks x-ray penetration to prevent functional state determination, and it provides tamper-detection capabilities through resistance monitoring. The metal layer acts as a mediator that simultaneously addresses both x-ray shielding and tamper resistance requirements.

Inventive Principle:
Principle #24Intermediary (Mediator)

Solution Approach 2:

The patent implements a feedback mechanism where logic circuits continuously monitor the resistance of the backside patterned metal layer. When tampering is detected (indicated by resistance changes), the system generates alarm signals and can trigger countermeasures. This closed-loop feedback system enhances reliability by actively detecting and responding to tamper attempts, transforming the static shielding structure into a dynamic security system.

Inventive Principle:
Principle #23Feedback

2Reliability

If a backside patterned metal layer is added to prevent x-ray attacks and detect tampering, then security and tamper resistance are improved, but device complexity increases

Engineering Contradiction:
Improvetamper resistanceVSAvoidstructure complexity
Core Design Contradiction:
ReliabilityVSDevice complexity

Solution Approach 1:

The backside patterned metal layer is designed to perform multiple functions simultaneously: it provides x-ray shielding, serves as a tamper-detection sensor through resistance monitoring, and can act as an electrical connection layer. By making this single component multi-functional, the patent reduces the need for separate dedicated components for each security function, thereby limiting the increase in overall device complexity while achieving enhanced security.

Inventive Principle:
Principle #6Universality (Multi-functionality)

Solution Approach 2:

The patent combines several security functions into a single integrated structure. The backside patterned metal layer merges x-ray shielding, tamper detection sensing, and electrical connectivity functions that would traditionally require separate components. This consolidation approach achieves enhanced security capabilities while minimizing the increase in structural complexity by eliminating redundant elements.

Inventive Principle:
Principle #5Merging (Combining)

Applied Scientific Principles

This section explains which scientific principles are used to turn an abstract innovation direction into a practical engineering solution.

Function Achieved in This Case

Effectively prevents active x-ray attacks from determining the functional state of integrated circuits and thwarts the theft of key technology and intellectual property by detecting resistance changes and triggering a tamper signal upon tampering attempts.

Implementation Method 1

a backside patterned metal layer under the one or more devices, located and structured to protect the one or more devices from an active intrusion

Methodology Applied
Scientific EffectX-ray absorption: Absorption (EM radiation)

Implementation Method 2

prevent such unlocking can encompass package shielding

Methodology Applied
Scientific EffectX-ray scattering: Scattering

Implementation Method 3

a logic circuit connecting to the backside patterned metal layer via the at least one contact, and which is configured to detect a resistance change in the backside patterned metal layer

Methodology Applied
Scientific EffectElectrical resistance: Electrical Resistance

Data Source

PatentUS11121097B1Active x-ray attack prevention device
Publication Date: 2021.09.14 GLOBALFOUNDRIES US INC
  • US11121097B1 patent drawing
  • US11121097B1 patent drawing
  • US11121097B1 patent drawing

AI summary

The present disclosure relates to a metal layer for an active x-ray attack prevention device for securing integrated circuits. In particular, the present disclosure relates to a structure including a semiconductor material, one or more devices on a front side of the semiconductor material, a backside patterned metal layer under the one or more devices, located and structured to protect the one or more devices from an active intrusion, and at least one contact providing an electrical connection through the semiconductor material to a front side of the backside patterned metal layer. The backside patterned metal layer is between a wafer and one of the semiconductor material and an insulator layer.