Backside Power Delivery Channels for Stacked Memory Logic Heat Control

Resolve Bottlenecks,
Find Innovative Solutions
Generate Solutions

Solution Overview

Problem

Existing semiconductor systems face issues of high thermal concentration and degradation at logic chips due to direct power delivery, leading to increased latency and potential defects from defective logic chips, which affect the reliability and yield of the semiconductor system.

Innovation Solution

Implementing logic chips stacked above memory chips with a dielectric silicon layer and conductive channels for backside power delivery, which distributes thermal energy more evenly and allows for pre-testing of logic chips to ensure their functionality before integration.

Engineering Contradictions & Design Principles

VSEngineering Contradiction Analysis

1Device complexity

If power is delivered directly to logic chips, then power delivery is simple, but thermal concentration increases and reliability decreases

Engineering Contradiction:
Improvepower delivery structureVSAvoidlogic chip reliability
Core Design Contradiction:
Device complexityVSReliability

Solution Approach 1:

The patent introduces an intermediary power delivery structure consisting of a substrate with multiple power delivery paths between the power source and logic chips. This intermediary structure distributes power through multiple routes, preventing thermal concentration and improving reliability without requiring complex external cooling systems. The substrate acts as a mediator that transforms the simple but problematic direct power delivery into a distributed, thermally-managed power distribution network.

Inventive Principle:
Principle #24Intermediary (Mediator)

2Productivity

If logic chips are stacked above memory chips, then integration density improves, but thermal concentration at logic chips increases

Engineering Contradiction:
Improveintegration densityVSAvoidthermal concentration
Core Design Contradiction:
ProductivityVSTemperature

Solution Approach 1:

The patent segments the power delivery function into multiple independent power delivery paths on the substrate. Each path provides power to logic chips through different routes, distributing the thermal load across multiple channels rather than concentrating it at a single location. This segmentation allows high-density stacking while maintaining acceptable thermal conditions through parallel power distribution channels.

Inventive Principle:
Principle #1Segmentation

3Productivity

If defective logic chips are used, then manufacturing yield improves, but system reliability decreases

Engineering Contradiction:
Improvemanufacturing yieldVSAvoidsystem reliability
Core Design Contradiction:
ProductivityVSReliability

Solution Approach 1:

The patent changes the parameter of power delivery from a single concentrated path to multiple distributed paths with different characteristics. This parameter change enables the system to tolerate defects in individual paths or chips, as alternative paths can compensate for failures. The multi-path architecture transforms the binary accept/reject criterion into a more nuanced system where defective chips can be bypassed, maintaining both yield and reliability.

Inventive Principle:
Principle #35Parameter changes

Applied Scientific Principles

This section explains which scientific principles are used to turn an abstract innovation direction into a practical engineering solution.

Function Achieved in This Case

This approach reduces thermal concentration, improves latency, enhances reliability, and increases the yield of semiconductor systems by ensuring only functional logic chips are used, thereby extending the life of electronic devices and reducing electronic waste.

Implementation Method 1

distributes thermal energy more evenly

Methodology Applied
Scientific EffectThermal conduction: Conduction (thermal)

Data Source

PatentUS20250309121A1Backside power delivery to logic of a memory architecture
Publication Date: 2025.10.02 MICRON TECHNOLOGY INC
  • US20250309121A1 patent drawing
  • US20250309121A1 patent drawing
  • US20250309121A1 patent drawing

AI summary

Methods, systems, and devices for backside power delivery to logic of a memory architecture are described. A semiconductor system may implement logic chips stacked above stacks of memory chips, where the stacks of memory chips are positioned above circuitry associated with providing power to the semiconductor system. The semiconductor system may include a dielectric layer above the logic chips including conductive channels. For example, the circuitry may deliver power to the logic chips based on transferring power along power delivery vias to the conductive channels which may provide the power to the logic chips. In some examples, a front side of the logic chips may be bonded with a backside of the stacks of memory chips, and a backside of the logic chips may be bonded with the conductive channels, such that power is delivered to the backside of the logic chips.