Backside Power Distribution Layout for IR Drop and Signal Isolation

Resolve Bottlenecks,
Find Innovative Solutions
Generate Solutions

Solution Overview

Problem

Existing semiconductor devices face issues with significant voltage drop (IR drop) and power integrity due to the long power transmission path through top metal layers, which also limits the size reduction of semiconductor packages and causes interference with signal lines.

Innovation Solution

Implementing a backside power distribution network at the interface between a first substrate and a second substrate in semiconductor devices, which reduces the power transmission path length and minimizes IR drop, allowing for smaller semiconductor package sizes without interference issues.

Engineering Contradictions & Design Principles

VSEngineering Contradiction Analysis

1Power

If power distribution network is located on top metal layers, then power can be transmitted to front end of line active devices, but significant voltage drop (IR drop) occurs and power integrity deteriorates

Engineering Contradiction:
Improvepower transmission capabilityVSAvoidvoltage drop (IR drop)
Core Design Contradiction:
PowerVSLoss of energy

Solution Approach 1:

The power distribution network is inverted from the conventional top metal layer location to the substrate level, specifically implemented on the backside of the substrate. This inversion dramatically shortens the current path length, reducing the resistance and thus the IR drop, while still maintaining effective power delivery to the active devices.

Inventive Principle:
Principle #13The other way round (Inversion)

Solution Approach 2:

The power distribution network transitions from a planar arrangement in the top metal layers to a three-dimensional configuration utilizing the substrate depth. By placing power delivery structures at the substrate level and using vertical interconnects, the patent creates a multi-layer power distribution architecture that reduces horizontal current path length.

Inventive Principle:
Principle #17Another dimension (Dimensionality change)

2Power

If power rails and power lines are placed alongside signal lines in top metal layers, then power can be delivered to active devices, but semiconductor device size reduction is limited

Engineering Contradiction:
Improvepower delivery capabilityVSAvoidsemiconductor device size
Core Design Contradiction:
PowerVSDevice complexity

Solution Approach 1:

By inverting the power distribution network to the substrate level, the patent separates power delivery from the top metal layer signal routing. This allows the active devices to be positioned more freely without being constrained by the need for adjacent power rails in the same metal layer, enabling greater device miniaturization.

Inventive Principle:
Principle #13The other way round (Inversion)

3Power

If power lines are placed alongside signal lines in top metal layers, then power can be transmitted to active devices, but interference occurs within signal lines

Engineering Contradiction:
Improvepower transmission capabilityVSAvoidsignal line interference
Core Design Contradiction:
PowerVSObject-affected harmful factors

Solution Approach 1:

The patent segments the power distribution function from the signal routing function by placing them in different spatial locations. Power distribution is implemented at the substrate level while signal lines remain in the top metal layers, physically separating the two functions and eliminating the interference problem that occurs when they are placed alongside each other.

Inventive Principle:
Principle #1Segmentation

Solution Approach 2:

The patent uses vertical dimensionality to separate power and signal paths. Power delivery structures are positioned at the substrate level (lower dimension) while signal lines occupy the top metal layers (upper dimension), creating a three-dimensional separation that eliminates electromagnetic interference while maintaining both functions.

Inventive Principle:
Principle #17Another dimension (Dimensionality change)

Data Source

PatentEP4546418A1Semiconductor device backside power distribution network structure and method of making
Publication Date: 2025.04.30 AVAGO TECHNOLOGIES INTERNATIONAL SALES PTE LTD
  • EP4546418A1 patent drawingFigure 1
  • EP4546418A1 patent drawingFigure 2
  • EP4546418A1 patent drawingFigure 3

AI summary

Novel tools and techniques are provided for implementing a semiconductor package or a chip package, and more particularly methods, systems, and apparatuses are provided for implementing a semiconductor package or a chip package including a backside power distribution network. In various embodiments, an apparatus includes a first substrate comprising a device configured to receive a voltage and a first side located on a front side of the first substrate and a second side located on a back side of the first substrate, a second substrate, the second substrate configured to support the first substrate, and a power distribution network located at an interface between the second side of the first substrate and the second substrate.