Baffle Chamber Air Mixing for Uniform Multi-Duct Air Conditioning
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Solution Overview
Problem
In semiconductor manufacturing facilities, temperature and humidity variations in air supplied through multiple duct connection ports can lead to inconsistent resist thickness, causing issues in semiconductor component production, especially when space constraints limit the implementation of traditional solutions like increasing duct lengths.
Innovation Solution
An air conditioner design featuring a baffle plate within the chamber that generates turbulence in the air flow, ensuring uniform temperature and humidity distribution without requiring physical upsizing, by directing air to intersect with the baffle plate and creating an air-through opening for efficient mixing and expansion.
Engineering Contradictions & Design Principles
Engineering Contradiction Analysis
1Manufacturing precision
If the length of the path or duct is increased to stir the air and eliminate temperature and humidity distribution, then the temperature and humidity uniformity is improved, but the device size increases and installation space requirements increase
Solution Approach 1:
The patent introduces a baffle plate that extends in the width direction (lateral dimension) of the chamber to generate turbulence and stir the air flow. This approach shifts from solving the mixing problem in the length direction (by increasing duct length) to solving it in the width direction (by adding a baffle plate), thereby achieving temperature and humidity uniformity without increasing the overall device length or requiring additional installation space.
2Volume of moving object
If the device size is reduced or installation space is limited, then space utilization is improved, but the ability to stir air and eliminate temperature and humidity distribution deteriorates
Solution Approach 1:
The baffle plate is positioned to extend in the width direction of the chamber, utilizing the lateral space rather than the length direction. This dimensional shift allows effective air stirring and temperature-humidity uniformity to be achieved within a compact device footprint, making the solution suitable for installations with limited ceiling height or space constraints.
3Manufacturing precision
If a baffle plate is added to generate turbulence and stir air, then temperature and humidity uniformity is improved without increasing device size, but the device structure becomes more complex
Solution Approach 1:
The baffle plate is designed as a separate, modular component that can be independently installed within the chamber. This segmentation allows the stirring function to be added without redesigning the entire device structure, maintaining relative simplicity while achieving the desired temperature and humidity uniformity through the turbulence generated by the baffle plate.
4Volume of moving object
If the duct connection ports are positioned closer to reduce device size, then installation flexibility is improved, but air flow turbulence and mixing effectiveness deteriorate
Solution Approach 1:
The baffle plate serves as an intermediary element positioned between the air inlet and the duct connection ports. It actively generates turbulence and mixes the air flow, compensating for the reduced distance between the inlet and outlets. This mediator ensures that even with compact positioning, the air supplied to multiple duct connection ports maintains uniform temperature and humidity.
Applied Scientific Principles
This section explains which scientific principles are used to turn an abstract innovation direction into a practical engineering solution.
Function Achieved in This Case
This design effectively prevents temperature and humidity variations in air supplied to multiple duct connection ports, ensuring consistent resist thickness and improving manufacturing precision without the need for increased space or equipment size.
Implementation Method 1
since air that has passed through the discharge port of the blower or air that is passing therethrough hits the baffle plate part, the air flow changes so that turbulence can be generated in the chamber
Data Source
AI summary
An air conditioner according to the present invention includes: an air flow path through which air flows; a temperature control unit that controls a temperature of air in the air flow path; a humidifier capable of supplying vapor to the air flow path; a blower that has a suction port connected to a downstream opening of the air flow path, and a discharge port from which air sucked from the suction port is discharged; a chamber that has a communication port connected to the discharge port, and a plurality of duct connection ports configured to be connectable to ducts so as to let out air coming from the discharge port through the ducts; and a baffle plate part 8 disposed in the chamber, the baffle plate part overlapping at least partly with the discharge port when seen along a flow direction of air passing through the discharge port.