Arcuate-Opening Baffle Ring Structure for Shift-Induced Deformation
Find Innovative SolutionsGenerate Solutions
Solution Overview
Problem
Existing substrate processing apparatuses face damage due to shifts in the inner and outer rings of the baffle unit, leading to deformation and potential failure during gas flow processing.
Innovation Solution
A baffle unit design featuring an inner ring, outer ring, and connecting portion with arcuate openings and deformable walls that absorb vertical shifts between the rings, distributing deformation torsionally to prevent damage.
Engineering Contradictions & Design Principles
Engineering Contradiction Analysis
1Strength
If the inner ring and outer ring are rigidly connected, then structural strength is improved, but deformation concentration occurs during vertical shifts causing damage
Solution Approach 1:
The connecting portion is segmented into multiple rigid portions and walls, creating a modular structure that can distribute deformation across multiple elements rather than concentrating stress in a single rigid connection
Solution Approach 2:
The walls connecting the rigid portions are designed with controlled flexibility to accommodate vertical shifts between the inner and outer rings, allowing the structure to deform elastically rather than fracturing under stress
2Strength
If stiffer materials like Si or SiC are used, then structural strength is improved, but processing interference increases
Solution Approach 1:
Different regions of the baffle unit have different material properties - the rigid portions use stiffer materials for structural strength while the connecting walls use more flexible materials to reduce processing interference, creating local optimization of material properties
3Ease of manufacture
If the connecting portion uses simple slots, then manufacturing is simplified, but deformation distribution is insufficient leading to damage
Solution Approach 1:
The connecting portion is divided into multiple rigid portions and connecting walls arranged in a grid-like pattern, which simplifies manufacturing through standardized components while effectively distributing deformation across the segmented structure
Solution Approach 2:
The deformation distribution is extended from a single-dimensional slot design to a two-dimensional array of rigid portions and walls, providing superior deformation distribution capability while maintaining manufacturing simplicity through repetitive patterns
Applied Scientific Principles
This section explains which scientific principles are used to turn an abstract innovation direction into a practical engineering solution.
Function Achieved in This Case
The design effectively suppresses deformation concentration, preventing damage to the baffle unit and allowing the use of stiffer materials like Si or SiC, which reduces processing interference and maintains electrical conductivity.
Implementation Method 1
allowing the use of stiffer materials like Si or SiC, which reduces processing interference and maintains electrical conductivity
Data Source
AI summary
A baffle unit includes an inner ring, an outer ring disposed outside the inner ring, and a connecting portion connecting the inner ring with the outer ring. The connecting portion includes multiple openings arranged in a radial direction of the baffle unit and in a circumferential direction of the baffle unit, each of the multiple openings being arcuate and extending in the circumferential direction; multiple rigid portions each being disposed between the adjacent openings of the multiple openings that are adjacent to each other on a same concentric circle of the baffle unit; and multiple walls each being formed between the adjacent openings of the multiple openings that are adjacent to each other in the radial direction. Each of the multiple walls connects a rigid portion of the multiple rigid portions with another rigid portion of the multiple rigid portions.