Alternating Baffle Plate Trap for Reactor Contamination Control
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Solution Overview
Problem
Contaminants from reactor system components, such as a contaminant trap system, can outgas and contaminate the reaction chamber or substrate, leading to impurities and process failures.
Innovation Solution
A baffle plate stack system with alternating baffle and complementary baffle plates, aligned in specific orientations and coupled by a noncircular cross-section rod, enhances contaminant trapping by increasing fluid contact and deposition on the plates, reducing downstream contamination.
Engineering Contradictions & Design Principles
Engineering Contradiction Analysis
1Object-affected harmful factors
If a contaminant trap system is used to collect materials from the reaction chamber, then contamination of downstream reactor components is reduced, but outgassing from the trap system can contaminate the reaction chamber and substrate
Solution Approach 1:
The trap system is divided into multiple baffle plates with alternating aperture patterns, creating segmented trapping zones that improve contaminant capture efficiency while managing outgassing risks through distributed surface areas
Solution Approach 2:
The baffle plates with alternating aperture patterns act as intermediary structures between the reaction chamber and downstream components, providing multiple surfaces for contaminant deposition while controlling fluid flow to minimize outgassing impact on the reaction chamber
2Productivity
If baffle plates with apertures are used to direct fluid flow, then contact with trap surfaces is maximized for contaminant deposition, but the alternating pattern increases device complexity
Solution Approach 1:
The baffle plates feature asymmetric aperture patterns where adjacent plates have complementary aperture arrangements, creating an alternating pattern that optimizes fluid flow path length and trap surface contact while maintaining manufacturable plate structures
Solution Approach 2:
The alternating aperture patterns utilize the spatial dimension perpendicular to fluid flow to create multiple trapping surfaces, effectively increasing the active trapping area without proportionally increasing the footprint or flow resistance
Applied Scientific Principles
This section explains which scientific principles are used to turn an abstract innovation direction into a practical engineering solution.
Function Achieved in This Case
The system effectively collects and deposits contaminants within the trap, minimizing contamination of the reaction chamber and substrate, thereby improving process purity and reliability.
Implementation Method 1
directs fluid flow to maximize contact with trap surfaces for contaminant deposition
Data Source
AI summary
A contaminant trap system of a reactor system may include a baffle plate stack including at least one baffle plate having an aperture spanning through a baffle plate body of the baffle plate, and a body portion; and at least one complementary baffle plate having a complementary aperture spanning through a complementary baffle plate body of the complementary baffle plate, and a complementary body portion. The at least one baffle plate and the at least one complementary baffle plate may be disposed in a baffle plate order between a first end and a second end of the baffle plate stack in which the baffle plates alternate with the complementary baffle plates, such that no two baffle plates or no two complementary baffle plates are adjacent in the baffle plate order. The at least one baffle plate may include a sintered material.