Alternating Baffle Plate Trap for Reactor Outgassing Control
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Solution Overview
Problem
Existing contaminant trap systems in reactor systems suffer from outgassing, leading to contamination of reaction chambers and substrates due to materials trapped within the system.
Innovation Solution
A baffle plate stack system with alternating baffle and complementary baffle plates, aligned in specific orientations and coupled by a noncircular coupling rod, enhances contaminant trapping and deposition within a reactor system, minimizing outgassing and contamination.
Engineering Contradictions & Design Principles
Engineering Contradiction Analysis
1Object-affected harmful factors
If a contaminant trap system is used to collect materials from the reaction chamber, then contamination of downstream reactor components is reduced, but outgassing from the trap system causes contamination of the reaction chamber and substrate
Solution Approach 1:
The trap system is divided into multiple baffle plates with alternating aperture patterns, creating segmented trapping zones that increase surface area for contaminant deposition while maintaining structural integrity and minimizing outgassing
Solution Approach 2:
A heater is introduced as an intermediary component to actively control the temperature of the trap system, preventing condensation and outgassing of trapped materials by maintaining the trap above the dew point of process gases
2Productivity
If baffle plates with apertures are used to allow gas flow, then reactant gases can pass through the contaminant trap system, but contaminants may pass through the apertures without being trapped
Solution Approach 1:
Different regions of the baffle plates have different properties: some areas have apertures for gas flow while other areas are solid surfaces for contaminant trapping. The aperture patterns are strategically designed to create turbulence and increase contact between gases and trapping surfaces
Solution Approach 2:
The trap system extends in multiple dimensions with stacked baffle plates creating a three-dimensional trapping volume. This increases the available surface area for contaminant deposition while maintaining adequate gas flow pathways
Applied Scientific Principles
This section explains which scientific principles are used to turn an abstract innovation direction into a practical engineering solution.
Function Achieved in This Case
The system effectively collects and deposits contaminants, reducing contamination of reactor components and substrates by increasing contact time and enhancing contaminant removal efficiency.
Implementation Method 1
The plurality of baffle plates and the plurality of complementary baffle plates may be disposed in a baffle plate orientation wherein at least a portion of the apertures of the plurality of baffle plates and at least a portion of the complementary solid body portions of the plurality of complementary baffle plates may be aligned along a first axis
Implementation Method 2
The system effectively collects and deposits contaminants, reducing contamination of reactor components and substrates by increasing contact time and enhancing contaminant removal efficiency
Data Source
AI summary
A contaminant trap system of a reactor system may comprise a baffle plate stack comprising at least one baffle plate comprising an aperture spanning through a baffle plate body of the baffle plate, and a solid body portion; and at least one complementary baffle plate comprising a complementary aperture spanning through a complementary baffle plate body of the complementary baffle plate, and a complementary solid body portion. The at least one baffle plate and the at least one complementary baffle plate may be disposed in a baffle plate order between a first end and a second end of the baffle plate stack in which the baffle plates alternate with the complementary baffle plates, such that no two baffle plates or no two complementary baffle plates are adjacent in the baffle plate order.