Balanced Flexural Resonator Structure for Low Energy Loss

The patent applies asymmetry by intentionally designing the resonator structure to compensate for the inherent asymmetry caused by wet chemical etching. The foot connection and extension geometries are specifically configured to counterbalance the etching-induced asymmetries, allowing the use of simple wet etching processes while achieving the required symmetry for high-quality factor operation.

The patent converts the harmful effect of etching asymmetries into a beneficial design feature. By analyzing the specific asymmetries introduced by wet etching, the design incorporates a foot connection and extension structure that transforms these asymmetries into balanced momentum components, thereby reducing vibrational energy losses while maintaining manufacturing simplicity.

The patent merges the compensation function into the existing resonator structure by integrating the foot connection and extension design with the primary resonating elements. This unified structure achieves symmetry compensation without adding separate compensation components, thereby improving manufacturing precision while limiting the increase in device complexity.

The foot connection design incorporates geometric features that enable self-alignment and self-balancing during fabrication. The symmetrical extension geometry and foot configuration allow the structure to automatically compensate for minor manufacturing variations, achieving high quality factor performance without requiring extremely tight manufacturing tolerances.