Barcode Reader Calibration via Electromagnet and Mask Thickness
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Solution Overview
Problem
Existing lithography equipment faces issues with abnormal barcode reading, leading to failed mask settings and prolonged manual calibration processes, which result in low calibration success rates and extended downtime due to the inability to automatically calibrate the barcode reading device.
Innovation Solution
A photomask inspection system comprising a thickness measurement device with multiple sensor modules and a calibration device including a calibration rod and electromagnet, which automatically measures mask thickness and calibrates the barcode reading device to ensure accurate operation and prevent oversized masks from entering the machine.
Engineering Contradictions & Design Principles
Engineering Contradiction Analysis
1Reliability
If manual calibration is performed when barcode reading device fails, then calibration can be completed, but calibration time is long and calibration success rate is low
Solution Approach 1:
The barcode reading device performs self-calibration by automatically reading the calibration barcode on the mask and adjusting its own parameters, eliminating the need for manual calibration operations and achieving both high success rate and short calibration time
Solution Approach 2:
The calibration barcode is pre-printed on the mask during mask manufacturing, so that when the mask enters the lithography equipment, the calibration data is already available and the barcode reading device can immediately perform calibration without waiting for external calibration operations
2Productivity
If barcode reading device is used to read mask barcode, then mask information can be obtained, but when device fails, mask settings fail and mask function fails
Solution Approach 1:
The calibration barcode serves as an intermediary element that carries calibration data on the mask itself, enabling the barcode reading device to obtain accurate calibration information even when reading other mask parameters fails, thus ensuring continuous reliable operation
Solution Approach 2:
The calibration barcode is prepared in advance on the mask to provide a backup calibration source, cushioning against the failure of the barcode reading device to read normal mask barcodes and ensuring that mask settings can still be completed successfully
Applied Scientific Principles
This section explains which scientific principles are used to turn an abstract innovation direction into a practical engineering solution.
Function Achieved in This Case
The system effectively measures mask thickness, prevents oversized masks from causing damage, and automatically calibrates the barcode reading device, improving calibration speed and accuracy, thereby ensuring the normal operation of the lithography equipment and reducing downtime.
Implementation Method 1
a calibration device, the calibration device includes a calibration rod and an electromagnet, the calibration rod includes a calibration stick and a calibration base, the electromagnet is arranged to relate to the bottom of the calibration base
Data Source
AI summary
The present disclosure provides a photomask inspection system and an inspection method. The mask inspection system includes: a mask thickness measuring device having sensor modules arranged side by side for measuring the thickness of the mask; a bar code reading device; a calibration device including a calibration rod and an electromagnet, the calibration rod includes a calibration stick and a calibration base, the electromagnet is set at the bottom of the calibration base, and the calibration device calibrates the barcode reading device.