Barrier Layer Packaging for Corrosion-Resistant Die Attach

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Solution Overview

Problem

Semiconductor devices face corrosion and cracking issues due to corrosive ions from the sealing resin interacting with the element joining layer, leading to reduced heat dissipation and reliability, especially under thermal stress and large current conditions.

Innovation Solution

A barrier layer, such as aluminum oxide, is formed between the sealing resin and the element joining layer to block corrosive ions, preventing corrosion and maintaining the structural integrity and heat dissipation capabilities of the element joining layer.

Engineering Contradictions & Design Principles

VSEngineering Contradiction Analysis

1Reliability

If the sealing resin directly contacts the element joining layer, then the device structure is simple, but corrosive ions from the sealing resin cause corrosion and cracking in the element joining layer

Engineering Contradiction:
Improvecorrosion resistance of element joining layerVSAvoidstructure complexity
Core Design Contradiction:
ReliabilityVSDevice complexity

Solution Approach 1:

A barrier layer is introduced as an intermediary between the sealing resin and the element joining layer. This barrier layer prevents direct contact between corrosive ions from the sealing resin and the element joining layer, thereby eliminating corrosion and cracking issues while maintaining overall structural simplicity.

Inventive Principle:
Principle #24Intermediary (Mediator)

Solution Approach 2:

The interface region between the sealing resin and element joining layer is segmented by introducing a separate barrier layer. This segmentation isolates the corrosive environment from the sensitive element joining layer, protecting it from degradation while allowing the sealing resin to perform its encapsulation function.

Inventive Principle:
Principle #1Segmentation

2Reliability

If the element joining layer is exposed to corrosive ions, then the manufacturing process is simple, but heat dissipation capability deteriorates due to corrosion and cracking

Engineering Contradiction:
Improveheat dissipation reliabilityVSAvoidmanufacturing process complexity
Core Design Contradiction:
ReliabilityVSEase of manufacture

Solution Approach 1:

The barrier layer serves as a protective intermediary that shields the element joining layer from corrosive ions. This prevents corrosion-induced degradation of heat dissipation pathways, ensuring reliable thermal management without complicating the manufacturing process.

Inventive Principle:
Principle #24Intermediary (Mediator)

Solution Approach 2:

The barrier layer is formed in advance before the sealing resin is applied, creating a pre-protective shield against corrosive ions. This preliminary protective action prevents future corrosion damage to the element joining layer's heat dissipation functionality.

Inventive Principle:
Principle #10Preliminary action

3Power

If thermal stress and large current conditions are applied, then the device operates at high performance, but corrosion and cracking accelerate in the element joining layer

Engineering Contradiction:
Improvecurrent handling capabilityVSAvoidstructural integrity of element joining layer
Core Design Contradiction:
PowerVSReliability

Solution Approach 1:

The barrier layer acts as a protective intermediary that isolates the element joining layer from corrosive ions, even under high thermal stress and large current conditions. This ensures structural integrity is maintained during high-power operation.

Inventive Principle:
Principle #24Intermediary (Mediator)

Solution Approach 2:

The barrier layer provides beforehand protection against corrosion that would otherwise be accelerated by thermal stress and large currents. This prior cushioning prevents the synergistic degradation effect of combined thermal and chemical stressors.

Inventive Principle:
Principle #11Beforehand cushioning (Prior cushioning)

Applied Scientific Principles

This section explains which scientific principles are used to turn an abstract innovation direction into a practical engineering solution.

Function Achieved in This Case

The barrier layer effectively suppresses corrosion and cracking in the element joining layer, ensuring reliable heat dissipation and structural integrity even under thermal stress and large current conditions, enhancing the overall performance and reliability of the semiconductor device.

Implementation Method 1

a barrier layer which is formed at a boundary portion between the sealing resin and the element joining layer and blocks corrosive ions derived from the sealing resin

Methodology Applied
Scientific EffectIon blocking: Diffusion Barrier

Data Source

PatentUS20240153836A1Semiconductor device
Publication Date: 2024.05.09 ROHM CO LTD
  • US20240153836A1 patent drawing
  • US20240153836A1 patent drawing
  • US20240153836A1 patent drawing

AI summary

A semiconductor device includes a die pad, a semiconductor element which is disposed on the die pad, an element joining layer which is formed between the die pad and the semiconductor element and joins the semiconductor element to the die pad, a sealing resin which covers the die pad, the semiconductor element, and the element joining layer, and a barrier layer which is formed at a boundary portion between the sealing resin and the element joining layer and blocks corrosive ions derived from the sealing resin. The sealing resin may have an end surface which forms a peripheral outer shape of the sealing resin, and the die pad may include a protruding portion which protrudes outside the sealing resin, with the end surface of the sealing resin given as a starting point.