Barrier Photodetector Without Contact Layer

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Solution Overview

Problem

Barrier-type photo-detectors with contact layers face challenges in pixel isolation, leading to excessive dark current, complex fabrication processes, and reduced performance due to etched mesas and contact layer-related issues.

Innovation Solution

The development of barrier-type photo-detectors with minimal or no contact layers, where metal contacts are directly applied to the barrier or alloyed through a passivation layer to delineate pixels, allowing minority carrier flow while blocking majority carriers, and using a passivation layer to prevent oxidation and enhance pixel isolation.

Engineering Contradictions & Design Principles

VSEngineering Contradiction Analysis

1Reliability

If a contact layer is used in barrier-type photo-detectors, then pixel isolation can be achieved, but dark current increases and fabrication complexity increases

Engineering Contradiction:
Improvepixel isolationVSAvoiddark current
Core Design Contradiction:
ReliabilityVSObject-generated harmful factors

Solution Approach 1:

The patent removes the contact layer from the detector structure, extracting the problematic element that caused excessive dark current. The barrier layer itself is configured to provide both the blocking function and serve as the contact surface, eliminating the need for a separate contact layer that was generating harmful dark current.

Inventive Principle:
Principle #2Taking out (Extraction)

Solution Approach 2:

The barrier layer is given multiple functions: it blocks majority carriers, serves as a pixel isolation structure, and acts as the contact surface for electrical connection. This multi-functional design eliminates the need for separate dedicated contact layers while maintaining pixel isolation capabilities.

Inventive Principle:
Principle #6Universality (Multi-functionality)

2Manufacturing precision

If etching is used to isolate pixels, then pixel delineation is achieved, but fabrication complexity increases and dark current increases

Engineering Contradiction:
Improvepixel delineationVSAvoidfabrication process
Core Design Contradiction:
Manufacturing precisionVSDevice complexity

Solution Approach 1:

The patent eliminates the etching process by removing the need for deep pixel isolation trenches. Instead of etching down to isolate pixels, the design uses the natural barrier layer structure with metal contacts deposited on top, removing the complex multi-step etch and fill process while maintaining pixel delineation.

Inventive Principle:
Principle #2Taking out (Extraction)

Solution Approach 2:

Instead of isolating pixels by removing material (etching), the patent inverts the approach by using deposited material (metal contacts on barrier layer) to define pixel regions. This top-down definition replaces the traditional bottom-up isolation approach.

Inventive Principle:
Principle #13The other way round (Inversion)

3Manufacturing precision

If material removal is used for pixel isolation, then pixels are delineated, but excessive dark current is generated

Engineering Contradiction:
Improvepixel isolationVSAvoiddark current
Core Design Contradiction:
Manufacturing precisionVSObject-generated harmful factors

Solution Approach 1:

The patent removes the material removal step entirely by not etching the barrier layer. The barrier layer remains intact and continuous, providing pixel isolation through its inherent properties rather than through physical separation via etching, thereby eliminating dark current generation from exposed surfaces.

Inventive Principle:
Principle #2Taking out (Extraction)

Solution Approach 2:

The patent converts the potential harm of having a continuous barrier layer (which might allow lateral carrier transport) into a benefit by using the barrier's inherent high resistance properties and configuring the metal contacts to define pixel regions, turning the continuous structure into an advantage for reducing surface-related dark current.

Inventive Principle:
Principle #22Blessing in disguise (Convert harm into benefit)

4Reliability

If a contact layer is used, then electrical contact is achieved, but device complexity and fabrication steps increase

Engineering Contradiction:
Improveelectrical contactVSAvoidfabrication steps
Core Design Contradiction:
ReliabilityVSDevice complexity

Solution Approach 1:

The patent merges the barrier layer and contact layer into a single integrated structure. The barrier layer serves both as the carrier-blocking element and as the contact surface, eliminating the need for separate contact layer deposition and reducing fabrication steps while maintaining reliable electrical contact.

Inventive Principle:
Principle #5Merging (Combining)

Solution Approach 2:

The barrier layer performs multiple functions simultaneously: blocking majority carriers, providing pixel isolation, and serving as the electrical contact surface. This multi-functional design consolidates what would traditionally require separate layers into a single element, reducing device complexity.

Inventive Principle:
Principle #6Universality (Multi-functionality)

Applied Scientific Principles

This section explains which scientific principles are used to turn an abstract innovation direction into a practical engineering solution.

Function Achieved in This Case

This approach simplifies fabrication, reduces dark current, improves reliability, radiation hardness, and production yield, enabling higher temperature operation and reduced crosstalk, while eliminating the need for material removal and contact layer-related complications.

Implementation Method 1

the effective conduction and valance band alignments for the doped semiconductor layer and barrier are arranged so as to allow photo-generated minority carrier flow to the contacts but filter or block majority carrier flow

Methodology Applied
Scientific EffectEnergy band alignment:

Implementation Method 2

the passivation layer being such that the minority carriers passing through the barrier tunnel through the passivation layer to reach the metal contact regions

Methodology Applied
Scientific EffectOxidation prevention: Oxidation

Implementation Method 3

the passivation layer being such that the minority carriers passing through the barrier tunnel through the passivation layer to reach the metal contact regions

Methodology Applied
Scientific EffectQuantum tunneling:

Implementation Method 4

an absorber layer having predetermined majority and minority carrier types with corresponding energy bands

Methodology Applied
Scientific EffectPhotoelectric effect: Photoelectric Effect

Data Source

PatentUS9099371B1Barrier photodetector with no contact layer
Publication Date: 2015.08.04 LOCKHEED MARTIN CORP
  • US9099371B1 patent drawing
  • US9099371B1 patent drawing
  • US9099371B1 patent drawing

AI summary

A barrier-type photo-detector, such as an infra-red detector, is disclosed. The detector may include an absorber layer having predetermined majority and minority carrier types with corresponding energy bands; and a Barrier made, at least in part, of a semiconductor with a Barrier energy gap and corresponding conduction and valence bands, a first side of said Barrier adjacent a first side of said absorber layer. Metal contact regions may be disposed on the barrier layer, the metal contact regions delineating pixels where image data may be read out from the photo-detector; wherein the Barrier is configured so as to allow minority carrier current flow while blocking majority carrier current flow between the absorber layer and the metal contact regions.