Multi-portion Barrier Seal for Plasma Etching Erosion
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Solution Overview
Problem
Conventional barrier seals in plasma etching equipment, such as epoxy and elastomer rings, fail to provide reliable long-term sealing due to erosion from plasma gas, leading to gas leaks and environmental pollution, with unpredictable lifetimes and difficult installation.
Innovation Solution
A barrier seal with multiple chamfered sealing portions, including primary and minor sealing portions, is designed to fit various groove shapes, providing double or triple sealing protection and a buffer period for replacement before leaks occur, ensuring continuous operation and preventing pollution.
Engineering Contradictions & Design Principles
Engineering Contradiction Analysis
1Ease of operation
If a single elastomer ring is used to seal the groove, then installation is simplified, but the sealing reliability decreases due to erosion from plasma gas
Solution Approach 1:
The elastomer ring is divided into multiple sealing portions (primary sealing portion and at least one minor sealing portion) that are spatially separated. The primary sealing portion contacts the connecting layer while minor sealing portions contact the groove, creating multiple independent sealing zones. This segmentation ensures that if one sealing portion is eroded by plasma gas, other portions continue to provide sealing protection, thereby maintaining high sealing reliability while keeping the overall structure as a single installable component.
2Object-affected harmful factors
If epoxy is used to fill the groove, then the connecting layer is protected from plasma gas erosion, but the epoxy is easily eroded and loses protection function over time
Solution Approach 1:
The invention changes the material parameter from epoxy (organic polymer) to elastomer (cross-linked rubber material). The elastomer material has superior resistance to plasma gas erosion compared to epoxy, as evidenced by its ability to maintain sealing function over extended periods. This material parameter change extends the operational lifetime of the barrier seal from unpredictable epoxy degradation to reliable long-term elastomer performance.
3Volume of moving object
If the groove size is very small, then the electrostatic chuck structure is compact, but it is hard to install the elastomer ring evenly
Solution Approach 1:
The elastomer ring incorporates protrusions that extend in the radial dimension from the groove wall toward the center. These protrusions create anchoring points that guide the elastomer ring into proper positioning during installation. The dimensional feature (protrusion) transforms the installation process from a difficult fit-into-small-groove operation to a guided self-positioning installation, solving the ease of operation problem while maintaining compact groove dimensions.
4Device complexity
If there is only one sealing portion, then the barrier seal structure is simple, but gas leaks occur abruptly when the seal fails
Solution Approach 1:
The barrier seal includes both a primary sealing portion and at least one minor sealing portion positioned at different locations. The minor sealing portions act as backup sealing mechanisms that remain functional even when the primary sealing portion begins to erode. This creates a cushioning effect where the transition from functional to failed state is gradual rather than abrupt, providing advance warning before complete seal failure and gas leakage occurs.
Applied Scientific Principles
This section explains which scientific principles are used to turn an abstract innovation direction into a practical engineering solution.
Function Achieved in This Case
The multiple sealing portions effectively prevent abrupt gas leaks and extend the seal's operational life, ensuring stable and safe plasma etching processes by maintaining the integrity of the connecting layer and preventing environmental pollution.
Implementation Method 1
a side of the at least one edge is a chamfered edge; preventing the damage of the connecting layer by the plasma gas
Implementation Method 2
The barrier seal is an elastomer ring... the elastomer ring 140 may overcome the above problems of the epoxy 130
Data Source
AI summary
Provided is a barrier seal for an electrostatic chuck in the plasma etching process. The barrier seal comprises multiple sealing portions to block the connecting layer of the electrostatic chuck and the plasma gas. The groove of the electrostatic chuck may be completely filled by the barrier seal. Even one of the multiple sealing portions is destroyed in the plasma etching process by the plasma gas, the barrier seal still prevents leaking of the electrostatic chuck effectively. The barrier seal provides a buffer period for engineers to replace the damaged barrier seal before the leaking occurs. Danger of leaking caused by abrupt breaking of the barrier seal is reduced. Furthermore, the barrier seal facilitates stability and safety of the plasma etching process. The yield of products manufactured by the electrostatic chuck may be improved.