Adjustable Base Support for Deflection-Controlled Parallelism
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Solution Overview
Problem
Existing base supporting devices often experience deflection due to temperature differences and installation environments, which can hinder smooth movement of stages and rails.
Innovation Solution
A base supporting device with first and second supports that adjust to minimize deflection, utilizing active anti-vibration tables with pneumatic pressure adjustment to maintain the base's parallelism with the horizontal plane.
Engineering Contradictions & Design Principles
Engineering Contradiction Analysis
1Device complexity
If the base is supported only at end portions by first supports, then the structure is simple, but the base deflects due to temperature differences and installation environments
Solution Approach 1:
The support structure is divided into multiple independent support units: first supports at the end portions and a second support at the center portion. Each support unit independently adjusts the base height, allowing localized compensation for deflection while maintaining overall structural simplicity.
Solution Approach 2:
The second support acts as an intermediary element between the base and the supporting surface, specifically positioned at the center portion where deflection is most pronounced. This intermediary support compensates for temperature-induced deflection without requiring complete redesign of the entire support structure.
2Manufacturing precision
If the second support is added to adjust base deflection, then the base parallelism is improved, but the device complexity increases
Solution Approach 1:
The second support incorporates an adjustable height mechanism that can dynamically adapt to temperature changes and installation variations. This dynamic adjustment capability allows the support structure to maintain base parallelism without requiring complex rigid structures, thereby limiting the increase in device complexity.
3Stability of the object's composition
If vibration suppressors are used to support the stage surface plate, then the structure is stable, but the surface plate deflects under temperature differences
Solution Approach 1:
Different support units are assigned different functions: the first supports at the end portions provide overall structural stability, while the second support at the center portion specifically addresses local deflection issues caused by temperature differences. This localized quality differentiation resolves the contradiction between stability and parallelism.
Applied Scientific Principles
This section explains which scientific principles are used to turn an abstract innovation direction into a practical engineering solution.
Function Achieved in This Case
Effectively suppresses base deflection, ensuring smooth movement of stages and rails by dynamically adjusting the support points based on detected deflection and temperature differences.
Implementation Method 1
the active anti-vibration table including an air damper supporting the base using a pneumatic pressure and a pneumatic pressure adjuster configured to adjust the pneumatic pressure of the air damper
Data Source
AI summary
A working machine (base supporting device) includes a base having an upper surface that defines a horizontal plane including X and Y directions; first supports provided for opposite end portions in the X direction of the base and supporting the base in a Z direction; a second support disposed between the opposite end portions of the base supported by the first supports, supporting the base in the Z direction, and being adjustable in a position in the Z direction at which the base is supported; a deflection detecting section that detects an amount of deflection in the Z direction of the base; and a deflection controlling section that controls the second support, in which the deflection controlling section controls, based on the amount of deflection detected by the deflection detecting section, the second support to make the upper surface parallel to the X direction.