BAW Resonator Electrodes With High Acoustic Velocity for 10 GHz
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Solution Overview
Problem
Conventional materials and manufacturing techniques face challenges in increasing the working frequency of bulk acoustic wave (BAW) resonators beyond 6 GHz, leading to issues with mechanical stability, fragility, and high resistivity, which limits the practical boundaries for BAW filters.
Innovation Solution
Employing electrodes made from low resistivity materials such as binary intermetallic compounds, metal nitrides, carbides, borides, MXenes, MAX phases, and MAB phases, combined with a raised frame structure, to enhance acoustic velocity and mechanical stability, allowing for higher resonant frequencies.
Engineering Contradictions & Design Principles
Engineering Contradiction Analysis
1Speed
If conventional materials and manufacturing techniques are used to increase working frequency above 6 GHz, then resonant frequency is improved, but mechanical stability deteriorates and resistivity increases
Solution Approach 1:
The patent changes the material parameters of electrodes by selecting materials with high acoustic velocity (such as specific metal combinations, intermetallic compounds, or nitrides) instead of conventional materials. This parameter change allows achieving higher resonant frequencies while maintaining mechanical stability and acceptable resistivity levels, resolving the contradiction between frequency improvement and reliability deterioration
Solution Approach 2:
The patent employs composite electrode structures combining multiple materials with complementary properties. By creating composite materials with high acoustic velocity and appropriate mechanical properties, the device achieves higher resonant frequencies while maintaining structural integrity and stability, thus resolving the contradiction between speed improvement and reliability maintenance
2Speed
If conventional materials and manufacturing techniques are used to increase working frequency above 6 GHz, then resonant frequency is improved, but fragility increases
Solution Approach 1:
The patent modifies material parameters by selecting electrode materials with high acoustic velocity that inherently possess better mechanical strength properties. This allows achieving higher resonant frequencies while avoiding the fragility issues that arise with conventional thin resonator structures, thus resolving the contradiction between frequency improvement and strength deterioration
3Speed
If conventional materials and manufacturing techniques are used to increase working frequency above 6 GHz, then resonant frequency is improved, but resistivity increases
Solution Approach 1:
The patent changes the electrical parameters of electrodes by selecting materials with high acoustic velocity that also exhibit lower resistivity characteristics. This parameter change enables achieving higher resonant frequencies while reducing energy losses due to resistivity, thus resolving the contradiction between speed improvement and energy loss increase
Applied Scientific Principles
This section explains which scientific principles are used to turn an abstract innovation direction into a practical engineering solution.
Function Achieved in This Case
The use of these materials enables BAW resonators to achieve resonant frequencies up to 10 GHz with improved mechanical stability and reduced resistivity, overcoming the limitations of conventional manufacturing techniques.
Implementation Method 1
In BAW resonators, acoustic waves propagate in the bulk of a piezoelectric material layer
Implementation Method 2
acoustic waves propagate in the bulk of a piezoelectric material layer
Data Source
AI summary
Aspects and embodiments disclosed herein include a bulk acoustic wave (BAW) device comprising a first electrode and a second electrode, at least one of the first electrode and the second electrode including at least one of a binary intermetallic compound, a metal nitride, a metal carbide, a metal carbonitride, a metal boride, a MXene, a MAX phase, or a MAB phase, and a piezoelectric material layer positioned between the first electrode and the second electrode.