BAW Resonator Phase Selection for Sensorless Temperature Compensation

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Solution Overview

Problem

Bulk acoustic wave (BAW) resonator devices face challenges in temperature compensation when operating in liquid environments, particularly due to temperature drift, which affects sensitivity and signal-to-noise ratio, and conventional methods require independent temperature sensing or reference devices, introducing noise and complexity.

Innovation Solution

The method involves determining a phase angle where temperature and phase are correlated, using a relationship between frequency shifts at this phase and another phase correlated to temperature, allowing for temperature correction of raw S-parameter response signals without requiring temperature sensing, and selecting a phase for monitoring that maximizes sensitivity while minimizing temperature dependence.

Engineering Contradictions & Design Principles

VSEngineering Contradiction Analysis

1Reliability

If conventional temperature compensation methods using independent temperature sensors or reference devices are employed, then temperature drift can be compensated, but noise and device complexity increase

Engineering Contradiction:
Improvetemperature compensation accuracyVSAvoiddevice complexity
Core Design Contradiction:
ReliabilityVSDevice complexity

Solution Approach 1:

The patent extracts the temperature sensing function from separate temperature sensors and reference devices, and instead uses the inherent frequency response characteristics of the BAW resonator itself at different phase angles to derive temperature information. This eliminates the need for independent temperature sensing components while maintaining temperature compensation capability.

Inventive Principle:
Principle #2Taking out (Extraction)

Solution Approach 2:

The BAW resonator is made to serve multiple functions: it acts as both the primary sensing element for detecting target analytes and as an implicit temperature sensor. By monitoring frequency shifts at different phase angles, the same device provides both analytical measurements and temperature compensation without requiring separate components.

Inventive Principle:
Principle #6Universality (Multi-functionality)

2Reliability

If conventional temperature compensation methods using independent temperature sensors are employed, then temperature drift can be compensated, but signal-to-noise ratio deteriorates

Engineering Contradiction:
Improvetemperature compensation accuracyVSAvoidsignal-to-noise ratio
Core Design Contradiction:
ReliabilityVSMeasurement precision

Solution Approach 1:

The temperature sensing capability is extracted from separate temperature sensors and instead derived from the BAW resonator's own frequency response characteristics. By using the phase angle information already present in the resonator's output signal, the method avoids introducing additional noise sources while maintaining temperature compensation accuracy.

Inventive Principle:
Principle #2Taking out (Extraction)

3Measurement precision

If a phase angle providing maximum sensitivity is selected for monitoring, then sensitivity to target analytes is maximized, but temperature dependence increases

Engineering Contradiction:
ImprovesensitivityVSAvoidtemperature dependence
Core Design Contradiction:
Measurement precisionVSObject-affected harmful factors

Solution Approach 1:

The frequency response of the BAW resonator is segmented into different phase angle components. By monitoring multiple phase angles simultaneously, the method separates the sensitivity-related information (from one phase angle) from the temperature-related information (from another phase angle), allowing independent optimization of each function.

Inventive Principle:
Principle #1Segmentation

Solution Approach 2:

The method uses feedback by continuously monitoring the frequency response at different phase angles and using the temperature-derived information from one phase angle to compensate the sensitivity measurements from another phase angle. This closed-loop approach maintains maximum sensitivity while eliminating temperature dependence through real-time correction.

Inventive Principle:
Principle #23Feedback

4Reliability

If temperature compensation is implemented using separate reference devices, then temperature drift is compensated, but cost and hardware complexity increase

Engineering Contradiction:
Improvetemperature compensation accuracyVSAvoidhardware complexity
Core Design Contradiction:
ReliabilityVSDevice complexity

Solution Approach 1:

The temperature compensation function is extracted from separate reference devices and instead implemented using the BAW resonator's inherent frequency response characteristics. By processing the phase angle information from the resonator's own output signal, the system eliminates the need for additional reference devices and reduces hardware complexity.

Inventive Principle:
Principle #2Taking out (Extraction)

Applied Scientific Principles

This section explains which scientific principles are used to turn an abstract innovation direction into a practical engineering solution.

Function Achieved in This Case

This approach enables effective temperature compensation for BAW resonator devices, reducing noise and complexity, and improving sensitivity and signal quality by eliminating the need for temperature sensors and reference devices, while maintaining high operational sensitivity and minimal temperature dependence.

Implementation Method 1

Under an initial (e.g., no load) condition, an active region of a BAW resonator receiving an AC signal will vibrate at a natural resonance frequency. In exposure to a second condition (e.g., mass binding, pressure change, fluid viscosity change, fluid density change, etc.) that perturbs the active region (whether in a reversible or irreversible manner), the resonance frequency will shift

Methodology Applied
Scientific EffectResonance: Resonance

Implementation Method 2

In the case of a piezoelectric crystal resonator, an acoustic wave may embody a bulk acoustic wave (BAW) propagating through the interior (or 'bulk') of a piezoelectric material. BAW resonator devices typically involve transduction of an acoustic wave using electrodes arranged on opposing top and bottom surfaces of a piezoelectric material

Methodology Applied
Scientific EffectPiezoelectric effect: Piezoelectric Effect

Implementation Method 3

In a BAW resonator device, three wave modes can propagate, namely, one longitudinal mode (embodying longitudinal waves, also called compressional/extensional waves), and two shear modes (embodying shear waves, also called transverse waves), with longitudinal and shear modes respectively identifying vibrations where particle motion is parallel to or perpendicular to the direction of wave propagation

Methodology Applied
Scientific EffectAcoustic wave propagation: Sound

Data Source

PatentUS10571437B2Temperature compensation and operational configuration for bulk acoustic wave resonator devices
Publication Date: 2020.02.25 QORVO US INC
  • US10571437B2 patent drawing
  • US10571437B2 patent drawing
  • US10571437B2 patent drawing

AI summary

Operational configuration and temperature compensation methods are provided for bulk acoustic wave (BAW) resonator devices suitable for operating with liquids. Temperature compensation methods dispense with a need for temperature sensing, instead utilizing a relationship between (i) change in frequency of a BAW resonator at a phase with adequate sensitivity and (ii) change in frequency of a phase that is correlated to temperature. Operational configuration methods include determination of an initial phase response of a BAW resonator in which temperature coefficient of frequency is zero, followed by comparison of sensitivity to a level of detection threshold for a phenomenon of interest.