BAW Resonator Phase Compensation for Liquid Temperature Drift

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Solution Overview

Problem

Bulk acoustic wave (BAW) resonator devices face challenges in temperature compensation, particularly in liquid-based sensing applications, where temperature drift significantly affects measurement accuracy, and conventional methods require independent temperature sensing or reference devices, introducing noise and increasing complexity.

Innovation Solution

The method involves determining a phase angle where temperature and phase are correlated, allowing for temperature correction of raw S-parameter response signals using a relationship between frequency shifts at this phase and a phase correlated to temperature, eliminating the need for temperature sensing and enabling operation with maximum sensitivity and minimal temperature dependence.

Engineering Contradictions & Design Principles

VSEngineering Contradiction Analysis

1Measurement precision

If conventional temperature sensing methods are used for BAW resonators, then temperature compensation can be achieved, but noise increases and hardware complexity increases

Engineering Contradiction:
Improvetemperature compensation accuracyVSAvoidhardware complexity
Core Design Contradiction:
Measurement precisionVSDevice complexity

Solution Approach 1:

The patent extracts the temperature sensing function from the main measurement system by using a separate reference resonator that only experiences temperature effects. This reference resonator is electrically isolated from the measurement resonator, preventing noise coupling while still providing temperature compensation data through frequency ratio comparison.

Inventive Principle:
Principle #2Taking out (Extraction)

Solution Approach 2:

The patent introduces a reference resonator as an intermediary element that mediates between the temperature environment and the measurement system. This reference resonator acts as a pure temperature sensor that converts temperature effects into frequency changes, which then serve as compensation data for the measurement resonator without direct electrical connection.

Inventive Principle:
Principle #24Intermediary (Mediator)

2Measurement precision

If conventional temperature sensing methods are used for BAW resonators, then temperature compensation can be achieved, but signal-to-noise ratio decreases

Engineering Contradiction:
Improvetemperature compensation accuracyVSAvoidsignal-to-noise ratio
Core Design Contradiction:
Measurement precisionVSLoss of information

Solution Approach 1:

The patent extracts the temperature sensing function from the main measurement system by using a separate reference resonator that only experiences temperature effects. This reference resonator is electrically isolated from the measurement resonator, preventing noise coupling while still providing temperature compensation data through frequency ratio comparison.

Inventive Principle:
Principle #2Taking out (Extraction)

Solution Approach 2:

The patent creates a copy of the resonator structure as a reference element that replicates temperature sensitivity but is isolated from measurement interference. This reference copy serves as a clean template for understanding temperature effects without the contamination of analytical signal variations.

Inventive Principle:
Principle #26Copying

3Measurement precision

If phase angle is optimized for maximum sensitivity, then detection sensitivity improves, but temperature dependence increases

Engineering Contradiction:
Improvedetection sensitivityVSAvoidtemperature dependence
Core Design Contradiction:
Measurement precisionVSObject-affected harmful factors

Solution Approach 1:

The patent implements feedback by continuously monitoring the frequency ratio between measurement and reference resonators. This ratio provides real-time temperature compensation information that can be used to adjust or correct the measurement signal, effectively separating temperature effects from analytical signals even when operating at highly sensitive phase angles.

Inventive Principle:
Principle #23Feedback

Solution Approach 2:

The patent uses the reference resonator as a counterweight to balance out temperature effects. By measuring the frequency ratio between the measurement resonator and the temperature-only reference resonator, the system creates a compensating signal that counteracts temperature drift, allowing operation at maximum sensitivity phase angles without temperature penalties.

Inventive Principle:
Principle #8Anti-weight (Counterweight)

Applied Scientific Principles

This section explains which scientific principles are used to turn an abstract innovation direction into a practical engineering solution.

Function Achieved in This Case

This approach enhances the signal-to-noise ratio and reduces baseline drift, simplifying hardware requirements and improving measurement accuracy by correlating phase crossings with temperature effects, thus providing effective temperature compensation for BAW resonators in liquid environments.

Implementation Method 1

Under an initial (e.g., no load) condition, an active region of a BAW resonator receiving an AC signal will vibrate at a natural resonance frequency. In exposure to a second condition (e.g., mass binding, pressure change, fluid viscosity change, fluid density change, etc.) that perturbs the active region (whether in a reversible or irreversible manner), the resonance frequency will shift

Methodology Applied
Scientific EffectResonance: Resonance

Implementation Method 2

In the case of a piezoelectric crystal resonator, an acoustic wave may embody a bulk acoustic wave (BAW) propagating through the interior (or 'bulk') of a piezoelectric material. BAW resonator devices typically involve transduction of an acoustic wave using electrodes arranged on opposing top and bottom surfaces of a piezoelectric material

Methodology Applied
Scientific EffectPiezoelectric effect: Piezoelectric Effect

Data Source

PatentUS10866216B2Temperature compensation and operational configuration for bulk acoustic wave resonator devices
Publication Date: 2020.12.15 QORVO US INC
  • US10866216B2 patent drawing
  • US10866216B2 patent drawing
  • US10866216B2 patent drawing

AI summary

Operational configuration and temperature compensation methods are provided for bulk acoustic wave (BAW) resonator devices suitable for operating with liquids. Temperature compensation methods dispense with a need for temperature sensing, instead utilizing a relationship between (i) change in frequency of a BAW resonator at a phase with adequate sensitivity and (ii) change in frequency of a phase that is correlated to temperature. Operational configuration methods include determination of an initial phase response of a BAW resonator in which temperature coefficient of frequency is zero, followed by comparison of sensitivity to a level of detection threshold for a phenomenon of interest.