BAW Resonator Pairing for Second Harmonic Cancellation

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Solution Overview

Problem

Existing bulk acoustic wave (BAW) filters face challenges in effectively suppressing nonlinear responses, particularly the second harmonic response, which can degrade signal quality in radio frequency electronic systems.

Innovation Solution

The implementation of a filter design that includes multiple BAW resonators with specific geometric and electrical couplings, where each resonator has unique shapes and sizes within a 10% variation, allowing them to be coupled in series or parallel to partially cancel each other's nonlinear responses, thereby reducing the overall second harmonic response.

Engineering Contradictions & Design Principles

VSEngineering Contradiction Analysis

1Object-affected harmful factors

If a single BAW resonator is used, then the device complexity is low, but the second harmonic response is high and signal quality degrades

Engineering Contradiction:
Improvesecond harmonic responseVSAvoidnumber of resonators
Core Design Contradiction:
Object-affected harmful factorsVSDevice complexity

Solution Approach 1:

The filter is divided into multiple BAW resonators (at least two) with different geometric shapes but similar areas. Each resonator generates a second harmonic response that can be made equal in magnitude but opposite in phase through proper shaping, allowing them to cancel each other out when operated in parallel, thereby reducing the overall second harmonic response of the filter.

Inventive Principle:
Principle #1Segmentation

Solution Approach 2:

Different BAW resonators are designed with asymmetric geometric shapes (e.g., different footprint patterns, electrode configurations, or piezoelectric layer geometries) while maintaining comparable active areas. This asymmetric design enables each resonator to produce identical second harmonic magnitudes through tailored geometric factors, which is essential for effective cancellation when the resonators are operated in parallel with appropriate phase relationships.

Inventive Principle:
Principle #4Asymmetry

2Object-affected harmful factors

If multiple BAW resonators with different shapes are used to cancel nonlinear responses, then the second harmonic response is reduced, but the manufacturing precision requirements increase

Engineering Contradiction:
Improvesecond harmonic responseVSAvoidgeometric consistency
Core Design Contradiction:
Object-affected harmful factorsVSManufacturing precision

Solution Approach 1:

Each BAW resonator is designed with specific local geometric characteristics (different footprint shapes, electrode patterns, or cavity configurations) that are tailored to produce equal second harmonic magnitudes. The invention specifies that while shapes differ, the active areas should be substantially equal and geometric factors can be adjusted locally to achieve the required second harmonic cancellation, balancing manufacturing feasibility with performance requirements.

Inventive Principle:
Principle #3Local quality

3Power

If BAW resonators are coupled in series, then the voltage gain is increased, but the second harmonic cancellation effectiveness is reduced compared to parallel coupling

Engineering Contradiction:
Improvevoltage gainVSAvoidsecond harmonic response
Core Design Contradiction:
PowerVSObject-affected harmful factors

Solution Approach 1:

The invention explores both series and parallel coupling configurations, recognizing that parallel coupling provides optimal second harmonic cancellation while series coupling provides voltage gain. The patent describes how resonators can be shaped and coupled in different topologies to achieve different performance priorities, allowing designers to select the coupling mode that best fits their specific application requirements.

Inventive Principle:
Principle #13The other way round (Inversion)

Applied Scientific Principles

This section explains which scientific principles are used to turn an abstract innovation direction into a practical engineering solution.

Function Achieved in This Case

The proposed filter design significantly reduces the second harmonic response, enhancing signal quality and performance in radio frequency applications by effectively canceling out nonlinear effects across the BAW resonators.

Implementation Method 1

a first acoustic wave device having a piezoelectric layer between a first electrode and a second electrode

Methodology Applied
Scientific EffectPiezoelectric effect: Piezoelectric Effect

Implementation Method 2

A second acoustic wave device can be coupled to the first acoustic wave device to at least partially cancel a second harmonic response of the first acoustic wave device

Methodology Applied
Scientific EffectAcoustic wave generation and interference: Acoustic Radiation Pressure

Data Source

PatentUS12500573B2Acoustic wave filters with improved second harmonic response
Publication Date: 2025.12.16 SKYWORKS SOLUTIONS INC
  • US12500573B2 patent drawing
  • US12500573B2 patent drawing
  • US12500573B2 patent drawing

AI summary

A first acoustic wave device can have a piezoelectric layer between a first electrode and a second electrode. The first acoustic wave device can have a first shape and a first area. A second acoustic wave device can be coupled to the first acoustic wave device to at least partially cancel a second harmonic response of the first acoustic wave device. The second acoustic wave device can have a piezoelectric layer between a first electrode and a second electrode. The second acoustic wave device can have a second shape that is different from the first shape and a second area that is within a threshold amount of the first area.