Bulk acoustic wave resonator and electronic device

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Solution Overview

Problem

Existing bulk acoustic wave resonators face challenges in reducing insertion loss and maintaining performance due to heat generation from electromagnetic wave energy conversion, leading to temperature increases that can cause device failure.

Innovation Solution

Incorporating a first heat conduction layer on the bulk acoustic wave resonator's base substrate to efficiently guide heat away from the device, combined with additional heat conduction layers and vias to enhance thermal management, and using isolation layers to minimize electromagnetic wave leakage.

Engineering Contradictions & Design Principles

VSEngineering Contradiction Analysis

1Reliability

If a conventional bulk acoustic wave resonator structure is used, then the device structure is simple, but heat accumulates causing temperature rise and device failure

Engineering Contradiction:
Improvedevice reliabilityVSAvoiddevice temperature
Core Design Contradiction:
ReliabilityVSTemperature

Solution Approach 1:

The patent introduces a heat conduction layer as an intermediary component between the piezoelectric layer and the base substrate. This layer specifically addresses heat accumulation by providing a dedicated thermal conduction path, allowing heat to be efficiently transferred away from the active resonator components without interfering with the acoustic wave functionality.

Inventive Principle:
Principle #24Intermediary (Mediator)

Solution Approach 2:

The patent segments the heat conduction function from the structural support function by introducing a separate heat conduction layer. This segmentation allows the base substrate to maintain its mechanical support role while the dedicated heat conduction layer handles thermal management, improving overall heat dissipation efficiency.

Inventive Principle:
Principle #1Segmentation

2Loss of energy

If acoustic wave reflectors are added to limit acoustic wave signal diffusion, then insertion loss is reduced, but device complexity increases

Engineering Contradiction:
Improveinsertion lossVSAvoidresonator structure complexity
Core Design Contradiction:
Loss of energyVSDevice complexity

Solution Approach 1:

The patent makes the base substrate multi-functional by requiring it to serve both as the acoustic wave reflector and as the mounting surface for the piezoelectric layer. This eliminates the need for a separate reflector structure, reducing device complexity while maintaining the ability to limit acoustic wave signal diffusion and reduce insertion loss.

Inventive Principle:
Principle #6Universality (Multi-functionality)

Applied Scientific Principles

This section explains which scientific principles are used to turn an abstract innovation direction into a practical engineering solution.

Function Achieved in This Case

The solution effectively reduces the risk of device failure from temperature rises, maintaining performance and reducing insertion loss by timely dissipation of heat, thereby ensuring reliable operation.

Implementation Method 1

converted into an acoustic wave signal of mechanical vibration at an interface of the piezoelectric material and the metal electrode through an inverse piezoelectric effect

Methodology Applied
Scientific EffectInverse piezoelectric effect: Piezoelectric Effect

Implementation Method 2

converted into the radio frequency signal at the interface of the metal electrode and the piezoelectric material through a piezoelectric effect

Methodology Applied
Scientific EffectPiezoelectric effect: Piezoelectric Effect

Implementation Method 3

a first heat conduction layer on a side of the first electrode close to the base substrate

Methodology Applied
Scientific EffectHeat conduction: Conduction (thermal)

Data Source

PatentUS20250023547A1Bulk acoustic wave resonator and electronic device
Publication Date: 2025.01.16 BEIJING BOE TECH DEV CO LTD
  • US20250023547A1 patent drawing
  • US20250023547A1 patent drawing
  • US20250023547A1 patent drawing

AI summary

The present disclosure provides a bulk acoustic wave resonator and an electronic device, and belongs to the field of communication technology. The bulk acoustic wave resonator of the present disclosure includes: a base substrate, a first electrode, a piezoelectric layer, and a second electrode; the first electrode is on the base substrate, the second electrode is on a side of the first electrode away from the base substrate, the piezoelectric layer is between the first electrode and the second electrode; and orthographic projections of any two of the first electrode, the piezoelectric layer and the second electrode on the base substrate at least partially overlap with each other; wherein the bulk acoustic wave resonator further includes: a first heat conduction layer on a side of the first electrode close to the base substrate.