Charged Particle Beam Device Automatic Aberration Correction
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Solution Overview
Problem
Current charged particle beam devices require manual judgment for aberration correction, leading to inefficiencies due to measurement errors and interference between aberrations, resulting in prolonged adjustment times and inability to automatically optimize correction procedures for individual devices.
Innovation Solution
An automatic aberration-correcting device that learns optimum adjustment procedures using a value function table, allowing simultaneous correction of multiple aberrations through reinforcement learning, which updates based on correction outcomes to optimize the correction process.
Engineering Contradictions & Design Principles
Engineering Contradiction Analysis
1Productivity
If manual judgment is used for aberration correction, then correction can be performed, but adjustment time becomes prolonged and efficiency is reduced
Solution Approach 1:
The system performs automatic aberration correction by having the device itself measure aberrations and execute corrections without external manual intervention. The control unit automatically judges which aberrations to correct based on measured coefficients, eliminating the need for operator judgment and significantly reducing adjustment time.
Solution Approach 2:
The system implements a closed-loop feedback mechanism where aberrations are measured, corrections are applied, and results are evaluated. The control unit uses measured aberration coefficients to automatically determine correction priorities and adjusts correction amounts based on whether previous corrections achieved desired effects, continuously optimizing the correction process.
2Loss of time
If multiple aberrations are corrected simultaneously, then adjustment time is reduced, but measurement errors and interference between aberrations may increase
Solution Approach 1:
The system dynamically adjusts the correction strategy based on real-time measurements. The control unit selectively determines which aberrations to correct in each step based on measured coefficients, rather than applying fixed simultaneous corrections. This dynamic approach allows the system to handle multiple aberrations efficiently while maintaining accuracy by focusing on the most significant ones first.
Solution Approach 2:
The system changes correction parameters adaptively by adjusting the amount of correction applied based on measured aberration coefficients and previous correction outcomes. The control unit modifies correction amounts dynamically, increasing or decreasing correction strength based on whether the desired effect is achieved, thereby maintaining reliability while processing multiple aberrations.
3Ease of operation
If automatic correction is implemented, then operator skill requirements are reduced, but the system complexity increases
Solution Approach 1:
The control unit automatically performs all judgment and correction operations without requiring operator expertise. The system measures aberrations, determines which ones to correct, calculates correction amounts, and executes corrections autonomously. This self-service capability eliminates the need for skilled operators while the automated decision-making processes manage the system complexity internally.
Data Source
AI summary
This charged particle beam device comprises: an electron beam source (1); a charged particle optical system that includes an object lens (9) and that irradiates a sample (10) with electrons emitted from the electron beam source (1) as an electron beam (2); an aberration corrector (6) that corrects aberrations in the charged particle optical system; and a control unit (24) that controls the components of the charged particle optical system and the aberration corrector (6). The charged particle beam device further comprises an automatic aberration-correcting device (17) that autonomously acquires, through leaning, optimum adjustment procedures in order to reduce the time required for correcting parasitic aberrations that arise in the aberration corrector (6).