Charged Particle Beam Aberration Correction with Multi-Hole Stop
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Solution Overview
Problem
Existing charged particle beam devices with aberration correctors face complexity in adjustment and require significant experience due to lack of simple adjustment means and device configurations for chromatic and spherical aberration correction.
Innovation Solution
A charged particle beam device utilizing a multi-hole stop for aberration correction, where scanning images are formed with plurally divided beams to correct chromatic and spherical aberrations by judging the correction state and feeding back the results for adjustment, improving operability and allowing for deep focal depth through an orbicular zone aperture with a shielded center.
Engineering Contradictions & Design Principles
Engineering Contradiction Analysis
1Manufacturing precision
If an aberration corrector is used to correct chromatic and spherical aberrations, then manufacturing precision is improved, but device complexity increases and ease of operation deteriorates due to complicated adjustment procedures
Solution Approach 1:
The patent introduces a multi-hole stop as an intermediary component between the electron source and the aberration corrector. This stop divides the electron beam into multiple paths, creating separate image formations that can be independently adjusted. The multi-hole stop acts as a mediator that simplifies the adjustment process by providing distinct adjustment targets for each hole, making it easier to align and correct aberrations without requiring complex coordination of multiple parameters simultaneously.
Solution Approach 2:
The patent segments the electron beam into multiple separate beams using the multi-hole stop, with each hole creating an independent image path. This segmentation allows for independent adjustment of each beam path, simplifying the overall adjustment process. By dividing the complex aberration correction task into separate, manageable segments corresponding to each hole, the system becomes more operable while maintaining high precision correction capability.
2Manufacturing precision
If conventional adjustment methods are used for aberration correctors, then manufacturing precision can be achieved, but loss of time increases due to requiring sufficient experience and complex adjustment procedures
Solution Approach 1:
The patent enables the system to perform self-adjustment by providing visual feedback through the multi-hole stop. Each hole produces a distinct image that serves as a self-indicating reference for adjustment. The operator can directly observe the image positions and adjust the system without requiring external references or complex measurement procedures. This self-service capability reduces adjustment time by eliminating the need for experienced operators to perform complex diagnostic and adjustment procedures.
Solution Approach 2:
The multi-hole stop provides immediate visual feedback on the adjustment state by producing separate images whose positions directly indicate the degree and direction of aberration. This feedback mechanism allows for rapid iteration and adjustment, significantly reducing the time required to achieve precise aberration correction. The visual feedback eliminates the need for time-consuming measurement and calculation procedures required by conventional methods.
3Manufacturing precision
If multiple images are adjusted by comparing them on a display, then aberration correction can be achieved, but device complexity increases and ease of operation deteriorates
Solution Approach 1:
The patent uses the multi-hole stop to create multiple copies of the specimen image, with each hole producing a separate image copy. These copies are formed at different positions and can be independently adjusted. By creating simple geometric copies rather than requiring complex image processing and digital comparison, the system maintains low device complexity while achieving precise chromatic aberration correction through direct visual adjustment of the image positions.
Applied Scientific Principles
This section explains which scientific principles are used to turn an abstract innovation direction into a practical engineering solution.
Function Achieved in This Case
The solution simplifies the adjustment of aberration correctors, enhances operability, and facilitates automation by visually observing and processing image adjustments, effectively correcting chromatic and spherical aberrations while maintaining or improving focal depth.
Implementation Method 1
a multi-hole stop is used at the time of adjusting the aberration correction means and scanning charged particle beam images (for example, SEM images or SIM images) are formed with plurally divided beams
Implementation Method 2
it is possible to secure a deep focal depth by using an orbicular zone aperture the center of which is shielded in the state of the aberration correction
Data Source
AI summary
A scanning charged particle microscope which facilitates adjustment, has a deep focal depth, and is provided with an aberration correction means. The state of aberration correction is judged from a SEM image by using a stop having plural openings and the judgment result is fed back to the adjustment of the aberration correction means. A stop of a nearly orbicular zone shape is used in combination with the aberration correction means.