Charged Particle Beam Alignment Using Reference-Structure Light Feedback
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Solution Overview
Problem
In charged particle beam devices, accurately matching the irradiation position of a charged particle beam with the light irradiation position is challenging, especially when charging of a sample needs to be eliminated by light irradiation.
Innovation Solution
A method and device for adjusting the light irradiation position using an adjustment sample with a reference structure, where the light source irradiates the sample, and a photodetector detects secondary light generated by the reference structure, allowing the control device to adjust the light irradiation position to match the charged particle beam irradiation position.
Engineering Contradictions & Design Principles
Engineering Contradiction Analysis
1Object-affected harmful factors
If light irradiation is used to eliminate charging of the sample, then charging is reduced, but the irradiation position of light must be accurately matched with the charged particle beam irradiation position
Solution Approach 1:
A photodetector is introduced as an intermediary device to detect the position of light irradiation on the sample. The photodetector converts light position information into electrical signals, which are then used by the control device to adjust the light irradiation position to match the charged particle beam irradiation position, thereby resolving the position matching problem while maintaining charging elimination benefits
Solution Approach 2:
A feedback control mechanism is implemented where the photodetector continuously monitors the light irradiation position, and the control device adjusts the light source position based on the detected position information. This closed-loop feedback system ensures accurate and dynamic matching between light irradiation position and charged particle beam irradiation position
2Manufacturing precision
If a photodetector is added to detect light position, then irradiation position matching is improved, but device complexity increases
Solution Approach 1:
The photodetector serves multiple functions: it detects light irradiation position, provides feedback signals for position adjustment, and enables automatic control of the light source positioning system. This multi-functionality reduces the need for additional separate components, thereby limiting the increase in device complexity while achieving accurate position matching
Applied Scientific Principles
This section explains which scientific principles are used to turn an abstract innovation direction into a practical engineering solution.
Function Achieved in This Case
The method enables accurate matching of the charged particle beam and light irradiation positions, effectively eliminating charging and improving the precision of measurements such as absorption spectra and emission spectra.
Implementation Method 1
a photodetector configured to detect second light emitted from the sample due to the irradiation using the first light and generate a photoelectric signal
Implementation Method 2
a light source configured to generate the first light with which the sample is irradiated
Data Source
AI summary
A light irradiation positioning adjustment method adjusts an irradiation position of first light in a charged particle beam device that irradiates a sample. A particle beam detector detects the particle beam from the sample and generates a signal. A photodetector detects second light emitted from the sample due to the irradiation using the first light and generates a photoelectric signal. An adjustment sample placed on a sample stage with a reference structure is irradiated with the first light and the second light generated by the first light being modulated by the reference structure is detected to generate a photoelectric signal. A command is issued to change the irradiation position of the first light so as to pass through the reference structure based on a change in the photoelectric signal such that an irradiation position of the charged particle beam and the irradiation position of the first light match.