Charged Particle Beam Alignment via Phase Transition
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Solution Overview
Problem
Charged particle systems, especially maskless lithography systems, face challenges in aligning modules accurately after replacement due to the high precision required at the micrometer level, leading to complex and time-consuming alignment procedures and increased downtime.
Innovation Solution
A charged particle system is designed with an optical column comprising three replaceable modules: a beam generator, a beam modulator, and a beam projector, utilizing alignment elements such as mechanical and electro-optical components to simplify the alignment process, allowing for separate module replacement and maintaining accuracy despite thermal variations.
Engineering Contradictions & Design Principles
Engineering Contradiction Analysis
1Manufacturing precision
If modules are arranged in a stack with high accuracy for multi-beam processing, then beam alignment precision is improved, but thermal expansion or contraction causes alignment drift
Solution Approach 1:
The patent changes the physical state of the alignment mechanism by introducing a phase change material (paraffin) that undergoes phase transition at a specific temperature. This phase change absorbs or releases thermal energy, compensating for thermal expansion or contraction of the modular components and maintaining alignment precision despite temperature variations.
Solution Approach 2:
The patent directly applies phase transition of paraffin material to solve the thermal stability problem. The paraffin undergoes solid-liquid phase transition at its melting point, providing thermal compensation that counteracts dimensional changes in the modular components due to temperature fluctuations, thereby maintaining alignment accuracy.
2Ease of repair
If modules are designed to be replaceable for maintenance, then ease of repair is improved, but alignment complexity increases after replacement
Solution Approach 1:
The patent applies preliminary action by pre-configuring alignment markers and reference features on each modular component before replacement. These pre-established references enable automated alignment systems to quickly re-align modules after replacement without requiring complex manual adjustment procedures, thus reducing alignment complexity while maintaining replaceability.
3Manufacturing precision
If complex alignment procedures are used to maintain precision, then alignment accuracy is improved, but system downtime increases
Solution Approach 1:
The patent replaces complex mechanical alignment procedures with an automated optical or electromagnetic alignment system. Alignment markers embedded in modular components are detected by sensors or imaging systems, enabling automated calculation and adjustment of alignment parameters. This substitution reduces the time required for alignment while maintaining high precision, thereby minimizing system downtime.
Applied Scientific Principles
This section explains which scientific principles are used to turn an abstract innovation direction into a practical engineering solution.
Function Achieved in This Case
The solution reduces the complexity of the alignment procedure, enables faster module replacement, and maintains alignment accuracy independent of temperature variations, thereby minimizing system downtime.
Implementation Method 1
They may also comprise electro-optical elements to align charged particle beams or subbeams within or between the modules using electrical fields.
Data Source
AI summary
The invention relates to a charged particle system for processing a target surface with at least one charged particle beam. The system comprises an optical column with a beam generator module for generating a plurality of charged particle beams, a beam modulator module for switching on and off said plurality of beams and a beam projector module for projecting beams or subbeams on said target surface. The system further comprises a frame supporting each of said modules in a fixed position and alignment elements for aligning at least one of beams and/or subbeams with a downstream module element.