Charged Particle Beam Apparatus Needle Tip Positioning
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Solution Overview
Problem
Current charged particle beam apparatuses lack the capability for automatic and continuous sampling due to difficulties in accurately recognizing the tip position of the needle, often resulting in incorrect image recognition, needle deformation, and collisions with the sample piece, which hinders the repeated and precise relocation of sample pieces.
Innovation Solution
A charged particle beam apparatus equipped with a sample stage, a sample piece relocation unit, and a computer system that uses absorption current images for accurate positional control, allowing for the automatic recognition and precise relocation of sample pieces by generating templates for image matching and controlling the needle's movement.
Engineering Contradictions & Design Principles
Engineering Contradiction Analysis
1Measurement precision
If absorption current image is used for needle tip recognition, then measurement precision is improved, but reliability deteriorates when secondary electron yield is close to 1
Solution Approach 1:
The patent introduces a reference object (marker) as an intermediary element with known position and high contrast in absorption current images. This marker serves as a reliable reference point that compensates for the unreliability of direct needle tip recognition when secondary electron yield is close to 1. The marker's position is used to calculate the needle tip position through predetermined positional relationships, thereby ensuring reliable automated sampling even when the needle tip itself cannot be clearly distinguished.
2Productivity
If automated sampling is implemented, then productivity is improved, but device complexity increases due to image recognition requirements
Solution Approach 1:
The patent uses a simplified reference model (marker position and predetermined positional relationship) instead of complex needle tip shape recognition. By copying the known geometric relationship between the marker and needle tip, the system achieves automated sampling with reduced computational complexity. The image recognition system only needs to locate the high-contrast marker rather than analyze the complex shape and position of the needle tip directly.
3Manufacturing precision
If needle tip position is determined using absorption current image, then manufacturing precision is improved, but object-generated harmful factors increase due to carbon deposition film interference
Solution Approach 1:
The patent extracts the reference function from the needle tip itself and assigns it to a separate marker object. By taking out the position reference function from the needle tip (which is obscured by carbon deposition film), the system can rely on the marker's clear absorption current signal for positioning. This separation allows the carbon deposition film on the needle tip to be ignored, as the marker provides the reliable positional reference needed for precise sample piece relocation.
Applied Scientific Principles
This section explains which scientific principles are used to turn an abstract innovation direction into a practical engineering solution.
Function Achieved in This Case
Enables accurate and continuous automatic sampling by ensuring precise recognition and control of the needle's tip position, preventing collisions and enabling repeated sampling without manual intervention.
Implementation Method 1
a charged particle beam irradiation optical system that performs irradiation of a charged particle beam
Implementation Method 2
processing with a focused ion beam
Implementation Method 3
uses an image (also referred to as an absorption current image or an inflow current image) from an ion beam current which flows into the needle
Data Source
AI summary
A charged particle beam apparatus which automatically prepares a sample piece from a sample, includes: a charged particle beam irradiation optical system configured to perform irradiation of a charged particle beam; a sample stage configured to move, the sample being placed on the sample stage; a sample piece relocation unit configured to hold and transport the sample piece which is separated and picked up from the sample; a holder fixing stage which holds a sample piece holder to which the sample piece is relocated; and a computer which performs positional control in relation to a target object based on a template and positional information which is obtained from an image of the target object, the template being generated based on an absorption current image of the target object which is acquired using the irradiation of the charged particle beam.