Charged Particle Beam Apparatus for Non-Conductive Sample Analysis
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Solution Overview
Problem
Charged particle beam apparatuses face challenges in maintaining high spatial resolution and accuracy during SEM and EDX analysis of non-conductive samples under high vacuum environments, as electron beams scatter and cause electrification, leading to reduced image quality and inaccurate X-ray excitation.
Innovation Solution
A charged particle beam apparatus with a scanning deflector, detector, arithmetic unit, and irradiation controller that calculates and controls the irradiation pixel coordinates based on detected scanning control voltage, allowing precise control of the electron beam for non-conductive samples in high vacuum environments.
Engineering Contradictions & Design Principles
Engineering Contradiction Analysis
1Reliability
If a low vacuum environment is used to suppress electrification of non-conductive samples, then electrification is suppressed, but electron beam scattering increases causing reduced spatial resolution and image quality
Solution Approach 1:
The patent changes the vacuum level parameter from high vacuum to low vacuum environment to suppress electrification of non-conductive samples. By adjusting this physical parameter, the system resolves the contradiction between preventing sample electrification and maintaining beam quality, allowing observation of original sample surfaces without conductive coating.
2Reliability
If scanning speed is increased to reduce electrification, then electrification is suppressed, but the ability to externally control beam scanning for EDX analysis is compromised
Solution Approach 1:
The patent introduces a feedback mechanism where the actual beam position detected by the detector is fed back to the control system. This allows the system to maintain synchronized control between external devices (like EDX) and the electron beam position, enabling both slow scanning for electrification suppression and accurate external control for analytical measurements.
Solution Approach 2:
The patent uses an intermediary coordinate transformation system that converts between detector-based coordinates and scanner-based coordinates. This intermediary layer allows external devices to control the beam scanning while the system simultaneously manages irradiation timing to suppress electrification, bridging the control between external devices and internal beam management.
3Measurement precision
If electron beam irradiation time is extended to improve signal detection, then detection sensitivity improves, but electrification of the sample surface increases
Solution Approach 1:
The patent implements periodic action by controlling the electron beam to be irradiated only during specific time windows when the sample is being scanned by the external device. The beam is turned off during periods when no measurement is being performed, allowing the sample surface to recover from electrification while maintaining sufficient signal accumulation during active measurement periods.
Applied Scientific Principles
This section explains which scientific principles are used to turn an abstract innovation direction into a practical engineering solution.
Function Achieved in This Case
Enables stable detection of charged particles and electromagnetic waves, improving the observation and analysis of non-conductive samples by suppressing electrification and maintaining high spatial resolution and analysis accuracy.
Implementation Method 1
gas molecules are ionized by the interaction between an electron beam and the gas molecules
Implementation Method 2
scanning a charged particle beam emitted from the charged particle gun onto a sample by using a magnetic field or an electric field generated by a scanning deflector
Implementation Method 3
Charged particles (secondary electrons or reflected electrons) generated from a sample by irradiation with an electron beam
Implementation Method 4
electromagnetic waves (X-rays or light) are emitted from the sample as well as the above-stated charged particles
Data Source
AI summary
In order to provide a charged particle beam apparatus capable of stably detecting secondary particles and electromagnetic waves even for a non-conductive sample under high vacuum environment and enabling excellent observation and analysis, the charged particle beam apparatus includes a charged particle gun (12), scanning deflectors (17 and 18) configured to scan a charged particle beam (20) emitted from the charged particle gun (12) onto a sample (21), detectors (40 and 41) configured to detect a scanning control voltage input from an outside into the scanning deflectors, an arithmetic unit (42) configured to calculate, based on the detected scanning control voltage, irradiation pixel coordinates for the charged particle beam; and an irradiation controller (45) configured to control irradiation of the sample with the charged particle beam according to the irradiation pixel coordinates.