Charged Particle Beam Apparatus Position Detection Stability
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Solution Overview
Problem
Existing charged particle beam apparatuses face instability in automated micro-sampling due to failures in template matching, particularly when there are differences in contrast or focus between images, or surface shape variations caused by foreign material adhesion, leading to halted automated processes and reduced throughput.
Innovation Solution
A charged particle beam apparatus that incorporates a computer-controlled system using both template matching and machine learning models for position determination, allowing for automatic recovery from template matching failures and improved precision in detecting target positions, even in the presence of surface shape differences.
Engineering Contradictions & Design Principles
Engineering Contradiction Analysis
1Extent of automation
If template matching is used for position detection, then automated micro-sampling can be executed, but the process becomes unstable when there are differences in contrast, focus, or surface shape between the target image and template image
Solution Approach 1:
The system changes the detection method parameter from pure template matching to a hybrid approach that combines template matching results with machine learning-based position detection. When template matching fails or produces unreliable results (indicated by low correlation coefficients), the system switches to or integrates with alternative detection parameters (machine learning models) that are more robust to variations in contrast, focus, and surface shape.
2Extent of automation
If template matching is used for position detection, then automated micro-sampling can be executed, but the process halts when template matching fails
Solution Approach 1:
The system prepares alternative position detection methods (machine learning models) in advance as backup solutions. When template matching fails, the pre-prepared alternative methods are immediately activated to prevent process halts, ensuring continuous automated operation and maintaining throughput.
Solution Approach 2:
The system introduces an intermediary evaluation mechanism that assesses the reliability of template matching results (using correlation coefficients as a metric) and mediates between template matching and alternative detection methods. This intermediary layer ensures smooth transitions between methods and prevents process interruptions.
3Reliability
If multiple determination methods are used for position detection, then position detection success rate improves, but system complexity increases
Solution Approach 1:
The system dynamically adjusts the detection approach based on real-time conditions. It evaluates template matching results and automatically switches between or combines different determination methods as needed, rather than using a fixed complex system. This dynamic adaptation maintains high detection success rates while avoiding unnecessary complexity.
Solution Approach 2:
The position detection process is segmented into distinct stages: initial template matching, reliability evaluation, and conditional alternative detection. This segmentation allows the system to use simple methods when possible and only invoke more complex methods when necessary, balancing reliability with complexity management.
Data Source
AI summary
To stabilize automated MS, provided is a charged particle beam apparatus, which is configured to automatically fabricate a sample piece from a sample, the charged particle beam apparatus including: a charged particle beam irradiation optical system configured to radiate a charged particle beam; a sample stage configured to move the sample that is placed on the sample stage; a sample piece transportation unit configured to hold and convey the sample piece separated and extracted from the sample; a holder fixing base configured to hold a sample piece holder to which the sample piece is transported; and a computer configured to perform control of a position with respect to a target, based on: a result of second determination about the position, which is executed depending on a result of first determination about the position; and information including an image that is obtained by irradiation with the charged particle beam.