Charged Particle Beam Apparatus Intuitive Sample Tilt Control
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Solution Overview
Problem
Charged particle beam apparatuses, such as scanning electron microscopes, face difficulties in intuitively grasping the orientation and tilted state of samples, especially at high magnifications, due to the opaque vacuum chamber and limited visibility, making it challenging to align samples correctly.
Innovation Solution
Incorporating a charged particle beam source, optical system, a stage capable of tilting, and a display unit that uses a simulated image to represent the sample's tilted state, allowing users to designate observation targets and control the stage's movement intuitively through an operation input unit and control unit.
Engineering Contradictions & Design Principles
Engineering Contradiction Analysis
1Measurement precision
If the charged particle beam apparatus is used for high-magnification observation (10,000 times or higher), then the observation precision is improved, but the ease of operation deteriorates because it becomes difficult to recognize how the orientation of the sample seen with the naked eye corresponds to the sample appearance in the acquired image
Solution Approach 1:
The patent creates a simulated image that copies the actual sample appearance and overlays it with a platform image showing the sample stage orientation. This visual copy allows operators to intuitively understand the relationship between the physical sample orientation and the magnified image, resolving the contradiction between high-magnification precision and operational ease
Solution Approach 2:
The platform image serves as an intermediary between the physical sample stage and the magnified observation image. By displaying the platform image with orientation information overlaid on the simulated sample image, it mediates the operator's understanding of sample orientation, making high-magnification operation intuitive without sacrificing precision
2Device complexity
If only position information within a plane is provided, then the device complexity is reduced, but the loss of information increases because it becomes difficult to intuitively grasp the tilt direction and other details of the sample
Solution Approach 1:
The patent adds a new dimension of information by overlaying the platform image showing tilt direction and stage orientation onto the simulated sample image. This transforms the information display from two-dimensional position data to three-dimensional spatial orientation data, allowing operators to grasp tilt direction and sample details without increasing device complexity
Solution Approach 2:
The patent merges the simulated sample image with the platform image displaying orientation information. By combining these two images into a single composite display, the system provides comprehensive spatial information (position, tilt direction, stage orientation) without requiring separate display devices or increasing overall system complexity
Data Source
AI summary
In many cases, the charged particle beam apparatus is used basically for observation at a magnification of 10,000 times or higher. It is thus difficult to recognize how the orientation of a sample seen with the naked eye corresponds to the origination of the sample appearing on an acquired image. This makes it difficult intuitively to grasp the tilt direction and other details of the sample. An object of this invention is to provide a charged particle beam apparatus allowing the orientation and the tilted state of the sample to be grasped intuitively. The apparatus includes: a charged particle beam source that emits a charged particle beam; a charged particle beam optical system that irradiates the sample with the charged particle beam; a platform on which the sample is placed; a stage capable of moving the platform at least in a tilt direction; a display unit that displays a tilted state of the platform by use of a simulated image of the platform; an operation input unit that allows a user to designate the position and direction of the sample for observation; and a control unit that controls the amount of movement of the stage based on a signal input from the operation input unit.