Charged Particle Beam Apparatus Tilt Compensation
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Solution Overview
Problem
In scanning electron microscopy, it is challenging to distinguish compositional contrast from topographic contrast in images, especially at the nanoscale, as conventional methods require flattening the sample surface, which is difficult to achieve.
Innovation Solution
A charged particle beam apparatus with multiple detection units and an image processing unit that calculates the tilt direction and angle of the sample surface, allowing the representation of surface unevenness in color, thereby separating compositional and topographic contrasts in scanned images.
Engineering Contradictions & Design Principles
Engineering Contradiction Analysis
1Measurement precision
If the sample surface is flattened to eliminate topographic contrast, then compositional contrast can be clearly observed, but it becomes difficult to perform nanoscale observation and sample preparation becomes more complex
Solution Approach 1:
The invention extracts topographic contrast information from the compositional image by using multiple detection elements positioned at different angles. By calculating tilt direction and angle from signals of multiple detection elements, the system separates topographic effects from compositional signals, allowing compositional contrast to be observed without physically flattening the sample surface.
Solution Approach 2:
The invention creates a composite image by combining signals from multiple detection elements positioned at different angular positions. This composite approach allows simultaneous extraction of both compositional and topographic information, resolving the contradiction between observing compositional contrast and maintaining sample integrity.
2Loss of information
If multiple detection elements are added to separate compositional and topographic contrasts, then image analysis capability is improved, but device complexity increases
Solution Approach 1:
The detection system is segmented into multiple detection elements positioned at different angular positions around the electron beam path. Each detection element captures signals from specific directions, and the image processing unit segments the analysis by calculating tilt direction and angle from these distributed signals, enabling separation of topographic and compositional contrasts.
Solution Approach 2:
The image processing unit acts as an intermediary that receives signals from multiple detection elements and performs calculations to extract tilt direction and angle. This intermediary processing layer transforms complex multi-element signals into interpretable topographic information, reducing the complexity burden on the overall system.
3Loss of information
If conventional image comparison methods are used to distinguish compositional and topographic contrasts, then both contrasts can be captured, but time-consuming manual analysis is required
Solution Approach 1:
The system performs preliminary action by automatically calculating tilt direction and angle from detection element signals during the imaging process. This automatic extraction of topographic parameters eliminates the need for subsequent manual comparison and analysis of separate compositional and topographic images, significantly reducing analysis time while preserving complete contrast information.
Applied Scientific Principles
This section explains which scientific principles are used to turn an abstract innovation direction into a practical engineering solution.
Function Achieved in This Case
Enables easy discrimination between compositional and topographic contrasts in scanned images, facilitating accurate analysis without the need for sample flattening, particularly at the nanoscale.
Implementation Method 1
scanning a sample with a charged particle beam and detecting charged particles emitted from the sample
Implementation Method 2
calculating a tilt direction of a sample surface and a tilt angle of the sample surface based on the plurality of detection signals
Implementation Method 3
determining a color of a pixel of the scanned image based on the calculated tilt direction of the sample surface and the calculated tilt angle of the sample surface
Data Source
AI summary
A charged particle beam apparatus acquires a scanned image by scanning a sample with a charged particle beam and detecting charged particles emitted from the sample. The charged particle beam apparatus includes: a plurality of detection units that detect charged particles emitted from the sample; and an image processing unit that generates the scanned image based on a plurality of detection signals outputted from the plurality of the detection units. The image processing unit performs a process of calculating a tilt direction of a sample surface and a tilt angle of the sample surface based on the plurality of the detection signals for an irradiation position of the charged particle beam; and a process of determining a color of a pixel of the scanned image according to the calculated tilt direction and the calculated tilt angle.