Composite Charged Particle Beam Apparatus Working Distance Reduction
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Solution Overview
Problem
Current methods for forming TEM lamellae using FIB apparatuses face challenges in reducing the working distance between the SEM and sample, limiting observation capability and sample processing precision, especially when trying to achieve high parallelism and fine structures.
Innovation Solution
A composite charged particle beam apparatus with a focused ion beam column and scanning electron microscope, featuring a rotatable stage with a perpendicular beam irradiation axis configuration, a movement mechanism with three perpendicular axes, and a tilt stage to accurately control sample orientation and reduce working distance, allowing for efficient processing and observation.
Engineering Contradictions & Design Principles
Engineering Contradiction Analysis
1Adaptability or versatility
If the SEM and FIB are disposed with a pinching angle smaller than 90 degrees and positioned above the sample surface to secure sample space and stage mechanism space, then the sample disposition freedom is improved, but the working distance between the SEM and sample cannot be reduced sufficiently, limiting observation resolution
Solution Approach 1:
The patent introduces a rotatable stage with a rotation axis perpendicular to both beam irradiation axes, enabling the sample to be rotated into different orientations. This dimensional change allows the sample to be positioned optimally for both SEM observation and FIB processing without compromising the working distance, thereby resolving the contradiction between disposition freedom and observation resolution
Solution Approach 2:
The rotatable stage provides dynamic adjustment capability, allowing the sample orientation to be changed during the processing and observation workflow. This dynamic repositioning enables optimal working distances to be achieved for different operational phases while maintaining sample accessibility for both beams
2Manufacturing precision
If a lamella with uniform thickness is formed using conventional FIB apparatus, then the parallelism of the lamella is improved, but the capability to observe fine structures and defects with high resolution is limited due to insufficient working distance reduction
Solution Approach 1:
The patent merges the FIB processing capability with high-resolution SEM observation capability in a single integrated apparatus. The perpendicular arrangement of beam irradiation axes allows simultaneous or sequential use of both beams on the same sample region, enabling high-precision lamella formation followed immediately by high-resolution observation of the formed structure without losing fine details
Solution Approach 2:
The rotatable stage acts as an intermediary mechanism that coordinates between the FIB processing requirements and SEM observation requirements. By enabling precise angular adjustment, it facilitates the transition between processing mode and observation mode while maintaining optimal conditions for both operations
Applied Scientific Principles
This section explains which scientific principles are used to turn an abstract innovation direction into a practical engineering solution.
Function Achieved in This Case
This configuration enables improved resolution and finer observations by reducing the working distance, allowing for the formation of highly sophisticated TEM lamellae with accurate thickness and fine structure preservation.
Implementation Method 1
a method of using a focused ion beam (FIB) apparatus is typically widely used
Implementation Method 2
it is necessary to process a sample which is an observed object to form a very thin lamella (a TEM lamella) which has the thickness of about several tens of nanometers
Data Source
AI summary
There is provided a composite charged particle beam apparatus, in which a first rotation axis of a rotatable stage intersects a beam irradiation axis of a FIB column and a beam irradiation axis of an SEM so as to be substantially perpendicular thereto, respectively, at a sample observing position, the rotatable stage is provided with a supporting member which can be rotated with respect to the first rotation axis, and the supporting member is connected to a movement mechanism which can dispose the sample at the sample observing position.