Charged Particle Beam Apparatus for Capacitance Estimation
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Solution Overview
Problem
Existing methods using charged particle beams struggle to accurately estimate capacitance characteristics of samples, as they primarily focus on steady-state charge measurements rather than temporal changes in charge amounts, making it difficult to determine capacitance values effectively.
Innovation Solution
A charged particle beam apparatus that utilizes a netlist representing an equivalent circuit of a sample's device structure, correspondence data between netlist nodes and sample coordinates, and pulsing condition data to estimate electrical characteristics, including capacitance, by measuring temporal changes in electron emission during pulsed electron beam irradiation.
Engineering Contradictions & Design Principles
Engineering Contradiction Analysis
1Measurement precision
If steady-state charge measurement methods are used, then resistance characteristics can be estimated, but capacitance characteristics cannot be accurately estimated
Solution Approach 1:
The patent applies periodic action by using pulsed electron beam irradiation instead of continuous irradiation. The electron beam is irradiated in periodic pulses, allowing the measurement of temporal changes in charge amount during the pulsing cycle. This periodic irradiation enables the detection of transient responses that reveal capacitance characteristics, which cannot be obtained through steady-state measurements alone.
2Measurement precision
If transient response measurement is implemented, then capacitance characteristics can be estimated, but measurement complexity increases
Solution Approach 1:
The patent implements feedback by comparing the measured emission amount temporal changes with calculation results from an equivalent circuit model. The system iteratively adjusts circuit parameters to minimize the difference between measured and calculated values, enabling accurate extraction of capacitance characteristics while managing measurement complexity through systematic comparison and validation.
3Loss of information
If pulsed electron beam irradiation is used, then temporal change information can be obtained, but irradiation control complexity increases
Solution Approach 1:
The patent applies periodic action by using pulsed electron beam irradiation instead of continuous irradiation. The electron beam is irradiated in periodic pulses, allowing the measurement of temporal changes in charge amount during the pulsing cycle. This periodic irradiation enables the detection of transient responses that reveal capacitance characteristics, which cannot be obtained through steady-state measurements alone.
Solution Approach 2:
The patent uses copying by creating an equivalent circuit model (netlist) that replicates the electrical characteristics of the actual device structure. This virtual model allows for calculation and comparison without requiring direct complex manipulation of the physical sample, simplifying the analysis of temporal response while maintaining measurement accuracy.
Applied Scientific Principles
This section explains which scientific principles are used to turn an abstract innovation direction into a practical engineering solution.
Function Achieved in This Case
Enables the accurate estimation of both resistance and capacitance characteristics of samples, facilitating quicker defect identification and improving product reliability and development efficiency.
Implementation Method 1
a charged particle beam optical system that irradiates a predetermined coordinate on a sample with a charged particle beam based on a pulsing condition
Implementation Method 2
a detector that actually measures an emission amount of electrons according to the irradiation of the charged particle beam by the charged particle beam optical system
Data Source
AI summary
Provided are a charged particle beam apparatus and a charged particle beam inspection system capable of estimating electrical characteristics of a sample including capacitance characteristics. The charged particle beam apparatus estimates electrical characteristics of the sample using the correspondence data representing the correspondence between the node of the netlist and the coordinate on the sample and the pulsing condition when the sample is irradiated with the charged particle beam in a pulsed manner. The charged particle beam optical system irradiates a predetermined coordinate on the sample with a charged particle beam based on a pulsing condition, and the detector actually measures an emission amount of electrons. The emission amount calculation unit calculates, for the node on the netlist corresponding to a predetermined coordinate, an emission amount of electrons according to a temporal change in a charged state accompanying the irradiation of the charged particle beam based on the pulsing condition. The comparator compares a measurement result by the detector with a calculation result by the emission amount calculation unit.