Charged Particle Beam Chamber Scope Noise Interference
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Solution Overview
Problem
In charged particle beam devices, the use of a chamber scope to observe the sample chamber with visible light generates noise that interferes with electromagnetic wave detectors, limiting simultaneous circumstance checking and sample observation.
Innovation Solution
A control unit that operates the chamber scope in either pre-photographing or observation mode, allowing for the generation of a guide image showing the positional relationship between the sample and components based on pre-photographed images, preventing electromagnetic wave interference during observation.
Engineering Contradictions & Design Principles
Engineering Contradiction Analysis
1Ease of operation
If the chamber scope is used to observe the sample chamber with visible light, then the circumstance checking inside the sample chamber is enabled, but noise is generated that interferes with the electromagnetic wave detector
Solution Approach 1:
The chamber scope is operated in pre-photographing mode before the detector begins observation to capture images of the sample chamber circumstances. These images are stored and later used to generate guide images, eliminating the need for simultaneous operation that would cause noise interference.
Solution Approach 2:
The actual visual observation function is replaced by creating and displaying guide images from pre-captured photographs. The guide images show positional relationships between components and serve as a copy of the visual information needed for operation, allowing the detector to work without interference.
2Reliability
If the chamber scope operates simultaneously with the detector, then real-time monitoring is possible, but the detector cannot accurately observe the sample due to electromagnetic wave interference
Solution Approach 1:
The chamber scope captures all necessary visual information before the detector begins observation. This preliminary photographing ensures that no real-time monitoring is lost, as the pre-captured images can be reviewed and used for operational decisions throughout the observation period.
Solution Approach 2:
A control unit acts as an intermediary that manages the sequential operation between the chamber scope and detector. It coordinates the pre-photographing mode, stores the captured images, generates guide images showing component positions, and displays them for user reference during detector operation, seamlessly bridging the gap between the two operations.
3Object-affected harmful factors
If the chamber scope is limited to pre-photographing mode, then noise interference is eliminated, but the user cannot check the sample chamber circumstances during observation
Solution Approach 1:
The real-time visual information is replaced by creating guide images from pre-captured photographs. These guide images display the positional relationships between the sample, objective lens, and other components, providing sufficient visual information for safe operation without requiring simultaneous chamber scope operation that would generate noise.
Applied Scientific Principles
This section explains which scientific principles are used to turn an abstract innovation direction into a practical engineering solution.
Function Achieved in This Case
Enables simultaneous checking of the sample chamber circumstances and sample observation without noise interference, preventing component misalignment and damage.
Implementation Method 1
a chamber scope that photographs a picture while irradiating the sample with the electromagnetic waves
Implementation Method 2
an energy dispersive X-ray spectrometry (EDS) detector that detects x rays generated by electron collision
Implementation Method 3
generates a guide image showing a positional relationship between the sample and the component based on the picture
Data Source
AI summary
Provided is a charged particle beam device using a detector that detects electromagnetic waves, in which a circumstance in a sample chamber can be checked, and a sample is observed with the detector at the same time. The charged particle beam device that observes a sample by using a charged particle beam, including: a component used for observing the sample; a detector that detects electromagnetic waves; a chamber scope that photographs a picture while irradiating the sample with the electromagnetic waves; and a control unit that controls the detector, the component, and an operation of the chamber scope, in which the control unit can be selectively operated in any one of a pre-photographing mode and an observation mode, the control unit causes the chamber scope to photograph the picture, in a state in which an operation of observing the sample by the detector is not performed in the pre-photographing mode, and the control unit, in the observation mode, does not cause the chamber scope to apply the electromagnetic waves, generates a guide image showing a positional relationship between the sample and the component based on the picture, and outputs the guide image.