Charged Particle Beam Device Electrostatic Chuck State Detection
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Solution Overview
Problem
The accuracy of measurement and processing in charged particle beam devices is affected by the state of the object, including distortion, clogging of foreign matter, and oxide films, which existing technologies do not adequately address by considering the object's state during measurement and processing.
Innovation Solution
A charged particle beam device equipped with an electrostatic chuck, a first voltage generation unit, and a state determination unit that includes a current waveform simulation unit, difference integration unit, and determination unit to assess the object's state based on the integration value of differences between simulated and actual electrostatic chuck currents, improving measurement and processing accuracy.
Engineering Contradictions & Design Principles
Engineering Contradiction Analysis
1Reliability
If the electrostatic chuck is used to adsorb the inspection object, then the object can be held for measurement and processing, but the accuracy of measurement and processing deteriorates when the object is in abnormal states such as distortion, clogging of foreign matter, or oxide film formation
Solution Approach 1:
The system performs preliminary determination of the object's state (checking for distortion, foreign matter clogging, oxide films) before measurement and processing. By using the electrostatic chuck current characteristics to detect abnormalities in advance, the system can identify problematic objects before they affect measurement accuracy, allowing for preventive actions such as removing the object or adjusting measurement parameters.
2Device complexity
If the state of the object is not considered during measurement and processing, then the measurement process can be simplified, but the accuracy of measurement and processing deteriorates due to undetected abnormalities
Solution Approach 1:
The system incorporates feedback by continuously monitoring the electrostatic chuck current and comparing it against simulated reference values. This feedback mechanism automatically determines the object's state (normal, distorted, clogged, or oxidized) and provides information that can be used to adjust the measurement process, thereby maintaining accuracy without significantly increasing operational complexity.
3Measurement precision
If pulse current measurement is performed to determine object state, then object abnormalities can be detected, but additional measurement steps and processing time are required
Solution Approach 1:
The system merges the object state determination process with the existing electrostatic chuck operation. The pulse current measurement is integrated into the normal chucking process, allowing state detection to occur during or immediately after the object is adsorbed, rather than as a separate preliminary step. This integration minimizes additional time requirements while maintaining detection accuracy.
Applied Scientific Principles
This section explains which scientific principles are used to turn an abstract innovation direction into a practical engineering solution.
Function Achieved in This Case
This solution enables the determination of object abnormalities such as clogging and distortion, allowing for adjustments to be made, thereby enhancing the accuracy of measurement and processing even when the object is in an abnormal state.
Implementation Method 1
an electrostatic chuck that adsorbs an inspection object
Data Source
AI summary
Provided is a charged particle beam device capable of improving the accuracy of measurement and processing. The charged particle beam device includes an electrostatic chuck that adsorbs an inspection object, a voltage generation unit that generates a voltage to be supplied to the electrostatic chuck, and a state determination unit that determines a state of the inspection object. Here, the state determination unit includes a current waveform simulation unit that simulates a time-series change of an electrostatic chuck current flowing through the voltage generation unit when the electrostatic chuck normally adsorbs the inspection object, a difference integration unit that acquires an integration value of a difference between a time-series change of a simulation current generated by the current waveform simulation unit and the time-series change of the electrostatic chuck current flowing through the voltage generation unit, and a difference determination unit that determines an adsorption state of the inspection object and a shape feature of the inspection object based on the integration value of the difference.