Charged Particle Beam Device Coal Resin Identification
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Solution Overview
Problem
Current methods for analyzing coal composition using electron beam devices are hindered by the difficulty in distinguishing coal from resin bedding materials due to similar atomic weights, leading to challenges in identifying minerals and achieving accurate imaging with backscattered electrons.
Innovation Solution
A method utilizing a charged particle beam device that differentiates between resin and coal by detecting interaction radiation and particles, allowing for the identification of coal and resin areas, enabling precise analysis of coal composition using EDX and cathodoluminescence imaging.
Engineering Contradictions & Design Principles
Engineering Contradiction Analysis
1Ease of manufacture
If resin is used as bedding material for coal sample, then ease of sample preparation is improved, but ability to distinguish coal from resin in imaging is worsened due to similar atomic weights
Solution Approach 1:
The patent segments the detection process into two distinct detection modes: first using interaction radiation detection to identify and map resin areas, then using backscattered electron detection to identify mineral particles within coal areas. This segmentation allows each detection mode to be optimized for its specific purpose, resolving the contradiction between ease of preparation and distinguishability.
Solution Approach 2:
The patent introduces interaction radiation detection as an intermediary step that provides additional information about the sample composition. This intermediary detection method bridges the gap between the resin bedding and coal sample, enabling differentiation despite similar atomic weights by detecting characteristic radiation from each material.
2Illumination intensity
If backscattered electron detection is used for imaging, then contrast between materials with different atomic weights is improved, but effectiveness for distinguishing coal from resin is worsened due to similar atomic weights
Solution Approach 1:
The patent merges two detection methods: interaction radiation detection and backscattered electron detection. The interaction radiation detection provides compositional information to distinguish resin from coal, while backscattered electron detection provides morphological information and mineral identification. By combining these methods, the patent achieves both good contrast and accurate distinction capability.
Solution Approach 2:
The patent adds another dimension to the analysis by using interaction radiation detection in addition to backscattered electron detection. This additional detection dimension provides complementary information that enables differentiation of coal from resin, which cannot be achieved by backscattered electron detection alone.
3Measurement precision
If interaction radiation detection is used first to identify resin areas, then accuracy in identifying coal areas is improved, but analysis time is increased due to additional detection steps
Solution Approach 1:
The patent performs preliminary action by first detecting and mapping resin areas using interaction radiation detection before proceeding to mineral analysis. This preliminary step creates a mask or map that guides subsequent backscattered electron detection, ensuring that only coal areas are analyzed for minerals, thereby reducing unnecessary analysis time while maintaining high accuracy.
Solution Approach 2:
The patent implements a dynamic, adaptive analysis approach where the detection process is adjusted based on preliminary findings. After identifying resin areas, the system dynamically adjusts the analysis to focus backscattered electron detection only on coal areas, optimizing the balance between accuracy and analysis time.
Applied Scientific Principles
This section explains which scientific principles are used to turn an abstract innovation direction into a practical engineering solution.
Function Achieved in This Case
Enables accurate identification and analysis of coal and resin areas, facilitating the determination of mineral content and reducing the negative effects associated with mineral combustion in power plants.
Implementation Method 1
the electromagnetic radiation may be in the form of X-rays. These X-rays may be detected by using energy dispersive X-ray spectroscopy (so called EDX)
Implementation Method 2
The electromagnetic radiation may also be in the form of cathodoluminescence light. By detecting and evaluating the cathodoluminescence light (for example using an intensity and spectral analysis), it is possible to determine properties of the material of the sample
Implementation Method 3
As a consequence of the interaction, in particular electrons are emitted from the surface of the sample to be examined (so-called secondary electrons)
Implementation Method 4
electrons of the primary electron beam are backscattered (so-called backscattered electrons)
Data Source
Figure 1
Figure 1A
Figure 2
AI summary
The invention refers to a method and a charged particle beam device (1) for analyzing an object (24) using a charged particle beam interacting with the object (24). The object (24) comprises a sample (15A) embedded in a resin (15B). Interaction radiation in the form of cathodoluminescence light is detected for identifying areas in which the resin (15B) is arranged and in which the sample (15A) is arranged. Interaction particles are detected to identify particles within the resin (15B) and the sample (15A) for further analysis by using EDX analysis.