Particle Beam Column Mechanical Alignment With Image Feedback
Find Innovative SolutionsGenerate Solutions
Solution Overview
Problem
Existing methods for adjusting particle beam columns, such as electron beam columns, are time-consuming and require significant manual effort, particularly in aligning mechanical components like magnetic lenses, which can be difficult due to manufacturing variations and lack of precise magnetic field determination.
Innovation Solution
An automated mechanical adjustment mechanism using electrically driveable actuators and image evaluation algorithms to position beam generators, anode stops, and condenser stops relative to one another, optimizing the alignment and focus of the particle beam.
Engineering Contradictions & Design Principles
Engineering Contradiction Analysis
1Productivity
If manual adjustment methods are used for particle beam columns, then alignment can be achieved, but the process is time-consuming and requires significant manual effort
Solution Approach 1:
The system performs self-adjustment by automatically determining the required mechanical adjustments based on measured beam parameters and executing them without human intervention. The control unit calculates optimal positions for beam-generating components and the adjustment mechanism autonomously implements these positions, making the system self-sufficient in its alignment process.
Solution Approach 2:
The patent replaces manual mechanical adjustment operations with an automated electromechanical system. Instead of operators physically moving components based on visual inspection or trial-and-error, an electrically-driven adjustment mechanism controlled by a control unit performs the mechanical repositioning based on computational analysis of beam parameters.
2Manufacturing precision
If manual alignment of mechanical components is performed, then positioning can be achieved, but manufacturing variations and lack of precise magnetic field determination make it difficult
Solution Approach 1:
The system measures actual beam parameters (such as beam position, size, or intensity) and uses this feedback information to determine the necessary mechanical adjustments. The control unit processes these measurements and calculates the optimal adjustment positions, creating a closed-loop system that compensates for manufacturing variations and achieves precise alignment.
Solution Approach 2:
The patent changes operational parameters (such as excitation currents of magnetic lenses or beam energy) to optimize beam quality and uses these parameter adjustments as indicators for determining the required mechanical component positions. By monitoring how parameter changes affect beam characteristics, the system infers the optimal mechanical alignment without direct measurement of magnetic fields.
3Productivity
If automated mechanical adjustment is implemented, then adjustment speed improves, but device complexity increases
Solution Approach 1:
The control unit serves multiple functions: it controls the beam-generating components, processes measurement data, calculates optimal adjustment positions, and drives the adjustment mechanism. By consolidating these functions into a single multi-functional control system, the patent reduces overall system complexity compared to having separate dedicated systems for each function.
Solution Approach 2:
The patent combines the measurement system, control unit, and adjustment mechanism into an integrated automated adjustment system. Rather than having separate manual adjustment procedures and measurement tools, these elements are merged into a unified system that performs both measurement and adjustment automatically, reducing the complexity of operating multiple independent systems.
Applied Scientific Principles
This section explains which scientific principles are used to turn an abstract innovation direction into a practical engineering solution.
Function Achieved in This Case
Facilitates rapid and precise mechanical adjustment of particle beam columns, improving focus and reducing downtime by automating the alignment process.
Implementation Method 1
secondary electrons or backscattered electrons generated by the incident electron beam on the object are detected
Implementation Method 2
an objective lens for focusing the particle beam onto an object, wherein interaction particles arise when the particle beam interacts with the object
Data Source
AI summary
Multiple automated mechanical adjustment methods for a particle beam column are disclosed. By way of example, a beam generator, a condenser lens system, a detection system and an objective lens system can be adjusted relatively quickly and precisely. Mechanical adjustment methods may be combined with electrical adjustment methods.