Particle Beam Component Positioning for Beam-Safe Deposition
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Solution Overview
Problem
Existing particle beam apparatuses face challenges in accurately and rapidly positioning components, such as gas feed devices, without interfering with the particle beam, particularly during processes like deposition or removal of materials on the object surface.
Innovation Solution
A method involving aligning components with the coincidence point of the particle beam, determining the rotation angle of the object carrier, loading the position from a database into a control unit, and using a drive unit, like a piezoactuator, to move the component to a predefinable distance from the object, ensuring precise positioning without disturbing the particle beam.
Engineering Contradictions & Design Principles
Engineering Contradiction Analysis
1Manufacturing precision
If the component is positioned close to the object for accurate material deposition, then the deposition precision is improved, but the component may interfere with the particle beam
Solution Approach 1:
The component is designed to be movable rather than fixed, allowing it to dynamically adjust its position between a first position (close to the object for deposition) and a second position (farther from the object to avoid beam interference). This dynamic positioning resolves the contradiction by enabling the system to switch between precision deposition mode and beam-safe mode.
Solution Approach 2:
A control unit acts as an intermediary that receives control signals and automatically positions the component at appropriate locations. This automated control system mediates between the conflicting requirements of close positioning for deposition accuracy and far positioning for beam safety, eliminating the need for manual intervention and ensuring precise, rapid positioning.
2Measurement precision
If manual positioning of the component is used, then the positioning accuracy can be observed, but the process is slow and time-consuming
Solution Approach 1:
The manual mechanical positioning process is replaced with an automated electromechanical system. A drive unit (such as a piezoactuator) receives electrical control signals and automatically positions the component, eliminating the need for slow manual observation and adjustment while maintaining or improving positioning accuracy through precise electronic control.
Solution Approach 2:
The control unit serves as an intermediary that automatically translates control signals into precise component positioning. This automated control mechanism eliminates the time loss associated with manual positioning operations while ensuring accurate placement of the component at the required positions.
3Productivity
If the component is moved rapidly to the processing position, then the productivity is improved, but the positioning accuracy may be compromised
Solution Approach 1:
The system performs preliminary positioning actions by first moving the component to a coarse position, then making fine adjustments to achieve precise alignment. This multi-stage positioning approach allows rapid movement to the general area followed by precise positioning, thereby maintaining both high productivity and high accuracy.
Solution Approach 2:
Automated drive units with precise control capabilities (such as piezoactuators) replace manual positioning mechanisms. These automated systems can rapidly move the component to the processing position while maintaining high positioning accuracy through electronic feedback and control, thus achieving both speed and precision simultaneously.
Applied Scientific Principles
This section explains which scientific principles are used to turn an abstract innovation direction into a practical engineering solution.
Function Achieved in This Case
Enables accurate and rapid positioning of components, allowing for efficient material deposition or removal on the object surface while maintaining the integrity of the particle beam process, improving the technical effect and automation of the process.
Implementation Method 1
using a drive unit, like a piezoactuator, to move the component to a predefinable distance from the object
Data Source
AI summary
A method for setting position of a component of a particle beam apparatus may be performed, for example, by the particle beam apparatus. The component may be embodied as a gas feed device, as a particle detector and/or as a beam detector. The method may include: aligning the component with a coincidence point of a particle beam of the particle beam apparatus, determining a rotation angle of a rotation of an object carrier about a rotation axis, loading a position of the component associated with the rotation angle from a database into a control unit, transmitting a control signal from the control unit to a drive unit for moving the component, and moving the component into the position loaded from the database by means of the drive unit, wherein the component arranged in the loaded position is at a pre-definable distance from the object.