Beam Control Apparatus for EUV Lithography
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Solution Overview
Problem
Current beam control systems for illumination beams lack simplicity and controllability, making it difficult to precisely manage the position and direction of the illumination beam, especially in applications requiring precise control like EUV lithography.
Innovation Solution
A beam control apparatus with a single control component, such as a control mirror or diffractive element, that allows for controlled displacement in multiple degrees of freedom, enabling precise tracking and shaping of the illumination beam by using a collector and focusing optical unit, imaging illumination optical unit assembly, and position sensors to detect and adjust the beam's position and direction.
Engineering Contradictions & Design Principles
Engineering Contradiction Analysis
1Device complexity
If a single control component is used for beam control, then device complexity is reduced, but beam control precision deteriorates
Solution Approach 1:
The control component is divided into multiple independent control elements (first control element and second control element) that can be independently adjusted. Each control element handles specific degrees of freedom, allowing precise control of the illumination beam's position and orientation while keeping the overall device construction simple with only one control component unit.
2Manufacturing precision
If multiple control components are used for precise beam tracking, then beam control precision is improved, but device complexity increases
Solution Approach 1:
Multiple control functions are merged into a single control component unit. The first and second control elements are integrated within one control component, which can be collectively adjusted to control the illumination beam's position in multiple degrees of freedom. This merging approach achieves precise beam tracking without increasing the number of separate control component units.
3Adaptability or versatility
If the control component is displaced in multiple degrees of freedom, then beam tracking capability is improved, but control mechanism complexity increases
Solution Approach 1:
The control component is designed with multi-functionality to handle multiple degrees of freedom. A single control component unit contains both the first and second control elements that can independently adjust different aspects of the illumination beam's position and orientation. This universal design allows the control mechanism to achieve comprehensive beam tracking capability without requiring multiple separate control mechanisms.
Applied Scientific Principles
This section explains which scientific principles are used to turn an abstract innovation direction into a practical engineering solution.
Function Achieved in This Case
Enables well-controllable and homogenized illumination with the ability to track and stabilize the beam, improving the precision and efficiency of illumination, particularly in metrology systems like EUV lithography, by allowing for precise control of the beam's position and direction.
Implementation Method 1
The control component can be a component which is mechanically directly connected to a beam section or to at least one surface that guides the illumination beam path. A control mirror can be provided to make a well-controllable beam direction predefinition possible. The control mirror can reflect the illumination beam.
Implementation Method 2
The beam control apparatus can comprise a collector and focusing optical unit for acquiring an illumination emission of the light source and for concentrating the acquired illumination beam into the aerial image.
Data Source
AI summary
A beam control apparatus for an illumination beam includes an imaging illumination optical unit assembly for imaging an intermediate focus of the illumination beam onto an object field to be illuminated. A control component that influences a beam path of the illumination beam is displaceable in at least one degree of freedom by at least one displacement actuator. A position sensor device of the beam control apparatus detects a position of the intermediate focus. A control device of the beam control apparatus is signal-connected to the position sensor device and the displacement actuator. From an intermediate focus position signal received from the position sensor device, the control device calculates control signals for the displacement actuator and forwards the latter to the displacement actuator for controlling the position of the intermediate focus. This results in a beam control apparatus which makes well-controllable illumination possible together with a simple construction.