Beam Damper Structure for Stable Laser Annealing Irradiation

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Solution Overview

Problem

Laser annealing apparatuses face issues with temperature rise due to reflected light, leading to positional displacement of optical elements and uneven irradiation, and the multi-layer absorption films used to mitigate this can be damaged or discolored by high-output laser light, reducing their absorptance and potentially increasing temperature further.

Innovation Solution

A laser irradiation apparatus with a beam damper comprising a first and second member opposing each other, featuring an eaves portion with a reflection surface to redirect reflected light internally, and a trapping structure with a light absorbing element and cooling system to manage heat and prevent damage to the absorption film.

Engineering Contradictions & Design Principles

VSEngineering Contradiction Analysis

1Temperature

If a multi-layer absorption film is used to absorb reflected light, then the temperature rise of the optical module is suppressed, but the absorption film may become damaged or discolored by high-output laser light, reducing its absorptance and potentially increasing temperature further

Engineering Contradiction:

Improvetemperature of optical moduleVSAvoiddurability of absorption film

Core Design Contradiction:

TemperatureVSReliability

Solution Approach 1:

A beam damper is introduced as an intermediary component between the optical module and the absorption film. The beam damper includes a reflection surface that redirects reflected light toward the absorption film, and a trapping structure with cooling system that manages heat before it reaches the absorption film, thereby protecting the film from direct high-output laser exposure while maintaining its light-absorbing function

Inventive Principle:

Principle #24Intermediary (Mediator)

Solution Approach 2:

The system changes the physical state and parameters of the reflected light by introducing a cooling system that actively manages temperature. The cooling system modifies the thermal parameters of the beam damper and absorption film, preventing temperature-induced damage while maintaining the absorption film's optical properties

Inventive Principle:

Principle #35Parameter changes

2Productivity

If high-output laser light is used to improve irradiation efficiency, then productivity increases, but the absorption film may become damaged or discolored, reducing absorptance and potentially causing temperature to rise

Engineering Contradiction:

Improveirradiation efficiencyVSAvoidstability of absorption film

Core Design Contradiction:

ProductivityVSReliability

Solution Approach 1:

The beam damper with its cooling system serves as a protective cushioning mechanism that is prepared in advance to handle the thermal load from high-output laser light. This preemptive heat management system prevents damage to the absorption film before it can occur, enabling sustained high-power operation

Inventive Principle:

Principle #11Beforehand cushioning (Prior cushioning)

3Loss of energy

If the absorption film is continuously exposed to reflected light, then it maintains high absorptance, but it becomes damaged or discolored over time, reducing absorptance and requiring replacement

Engineering Contradiction:

Improveabsorptance of reflected lightVSAvoidlifespan of absorption film

Core Design Contradiction:

Loss of energyVSDuration of action of stationary object

Solution Approach 1:

The beam damper acts as a protective intermediary that intercepts and cools reflected light before it reaches the absorption film. This mediation allows the absorption film to maintain its absorptance function while being protected from the degrading effects of continuous high-energy exposure, thereby extending its operational lifespan

Inventive Principle:

Principle #24Intermediary (Mediator)

Applied Scientific Principles

This section explains which scientific principles are used to turn an abstract innovation direction into a practical engineering solution.

Function Achieved in This Case

This configuration stabilizes laser irradiation by suppressing temperature rises and preventing damage to the absorption film, ensuring consistent and efficient irradiation even with high-output lasers, thereby improving the lifespan of the light absorbing element and maintaining productivity.

Implementation Method 1

the eaves portion has a reflection surface which reflects, toward an internal space enclosed by the first member and the second member, the reflected light having been reflected by the object

Methodology Applied

Scientific EffectReflection: Reflection

Implementation Method 2

a beam damper configured to absorb reflected light having been reflected by the object

Methodology Applied

Scientific EffectAbsorption (EM radiation): Absorption (EM radiation)

Data Source

PatentUS20230411159A1Laser irradiation apparatus and method of manufacturing semiconductor apparatus

Publication Date: 2023.12.21 JSW AKTINA SYST CO LTD

AI summary

A laser irradiation apparatus according to an embodiment includes an optical module which irradiates an object with laser light so as to form a linear irradiation region along a first direction and a beam damper which absorbs reflected light having been reflected by the object. The beam damper includes a member and a member fixed to the member. The member includes an eaves portion having an opening portion through which the reflected light passes. The eaves portion has a reflection surface which reflects, toward an internal space enclosed by the member and the member, reflected light having been reflected by the object.